TY - GEN A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Zschiedrich, Lin T1 - HelmPole - A finite element solver for scattering problems on unbounded domains: Implementation based on PML N2 - The solution of scattering problems described by the Helmholtz equation on unbounded domains is of importance for a wide variety of applications, for example in electromagnetics and acoustics. An implementation of a solver for scattering problems based on the programming language Matlab is introduced. The solver relies on the finite-element-method and on the perfectly-matched-layer-method, which allows for the simulation of scattering problems on complex geometries surrounded by inhomogeneous exterior domains. This report gives a number of detailed examples and can be understood as a user manual to the freely accessible code of the solver HelmPole. T3 - ZIB-Report - 03-38 KW - Helmholtz equation KW - finite element method KW - perfectly matched layer Y1 - 2003 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-7609 ER - TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - JOUR A1 - Bodermann, Bernd A1 - Buhr, Egbert A1 - Danzebrink, Hans-Ulrich A1 - Bär, Markus A1 - Scholze, Frank A1 - Krumrey, Michael A1 - Wurm, Matthias A1 - Klapetek, Petr A1 - Hansen, Poul-Erik A1 - Korpelainen, Virpi A1 - van Veghel, Marijn A1 - Yacoot, Andrew A1 - Siitonen, Samuli A1 - El Gawhary, Omar A1 - Burger, Sven A1 - Saastamoinen, Toni T1 - Joint Research on Scatterometry and AFM Wafer Metrology JF - AIP Conference Proceedings Y1 - 2011 U6 - https://doi.org/10.1063/1.3657910 VL - 1395 IS - 1 SP - 319 EP - 323 PB - AIP ER - TY - CHAP A1 - Bodermann, Bernd A1 - Hansen, Poul-Erik A1 - Burger, Sven A1 - Henn, Mark-Alexander A1 - Gross, Hermann A1 - Bär, Markus A1 - Scholze, Frank A1 - Endres, Johannes A1 - Wurm, Matthias T1 - First steps towards a scatterometry reference standard T2 - Proc. SPIE Y1 - 2012 U6 - https://doi.org/10.1117/12.929903 VL - 8466 SP - 84660E ER - TY - THES A1 - Burger, Sven T1 - Erzeugung und Untersuchung dunkler Solitonen in Bose-Einstein Kondensaten Y1 - 2000 ER - TY - JOUR A1 - Burger, Sven T1 - Simulation method improves accuracy for optical metrology and nanooptics design JF - SPIE Newsroom Y1 - 2009 U6 - https://doi.org/10.1117/2.1200905.1629 ER - TY - JOUR A1 - Babicheva, Viktoriia E. A1 - Vergeles, Sergey S. A1 - Vorobev, Petr E. A1 - Burger, Sven T1 - Localized surface plasmon modes in a system of two interacting metallic cylinders JF - J. Opt. Soc. Am. B Y1 - 2012 U6 - https://doi.org/10.1364/JOSAB.29.001263 VL - 29 IS - 6 SP - 1263 EP - 1269 ER - TY - JOUR A1 - Bethge, Jens A1 - Steinmeyer, Günter A1 - Burger, Sven A1 - Lederer, Falk A1 - Iliew, Rumen T1 - Guiding properties of chirped photonic crystal fibers JF - Journal of Lightwave Technology Y1 - 2009 U6 - https://doi.org/10.1109/JLT.2009.2021583 VL - 27 SP - 1698 ER - TY - JOUR A1 - Blome, Mark A1 - McPeak, Kevin A1 - Burger, Sven A1 - Schmidt, Frank A1 - Norris, David T1 - Back-reflector design in thin-film silicon solar cells by rigorous 3D light propagation modeling JF - COMPEL: Int. J. Comput. Mathem. Electr. Electron. Eng. Y1 - 2014 U6 - https://doi.org/10.1108/COMPEL-12-2012-0367 VL - 33 IS - 4 SP - 1282 EP - 1295 ER - TY - CHAP A1 - Burger, Sven A1 - Klose, Roland A1 - Schädle, Achim A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures T2 - Scientific Computing in Electrical Engineering Y1 - 2006 U6 - https://doi.org/10.1007/978-3-540-32862-9_24 SP - 169 EP - 175 PB - Springer Verlag ER - TY - CHAP A1 - Burger, Sven A1 - Kleemann, B. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures T2 - Microtechnologies for the New Millenium Y1 - 2009 U6 - https://doi.org/10.1117/12.822828 VL - 7366 SP - 736621 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Nguyen, H. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Martin, P. ED - Naber, R. T1 - Rigorous Simulation of 3D Masks T2 - Photomask Technology Y1 - 2006 UR - http://arxiv.org/pdf/physics/0610218 VL - 6349 SP - 63494Z PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Köhle, Roderick A1 - Zschiedrich, Lin A1 - Gao, W. A1 - Schmidt, Frank A1 - März, Reinhard A1 - Nölscher, Christoph ED - Weed, J. ED - Martin, P. T1 - Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation T2 - Photomask Technology Y1 - 2005 U6 - https://doi.org/10.1117/12.631696 VL - 5992 SP - 378 EP - 389 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Lockau, D. A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite-element simulations of light propagation through subwavelength apertures in metal films T2 - International Workshop on Optical Waveguide Theory and Numerical Modelling Y1 - 2009 VL - XVIII SP - 59 PB - Fraunhofer Institute for Applied Optics and Precision Engineering ER - TY - CHAP A1 - Burger, Sven A1 - Pomplun, Jan A1 - Schmidt, Frank ED - Bhushan, B. T1 - Finite Element Methods for Computational Nano-optics T2 - Encyclopedia of Nanotechnology Y1 - 2012 U6 - https://doi.org/10.1007/978-90-481-9751-4_17 SP - 837 EP - 843 PB - Springer Netherlands ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems T2 - Dig. LEOS/IEEE 2003 Summer Topicals Y1 - 2003 U6 - https://doi.org/10.1109/LEOSST.2003.1224282 SP - 75 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - 3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities T2 - Integrated Photonics Research, Silicon and Nanophotonics Y1 - 2010 U6 - https://doi.org/10.1364/IPRSN.2010.IWB7 SP - IWB7 PB - OSA ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin ED - Jena, Friedrich-Schiller-Universität T1 - FEM simulation of resonances in low-Q cavities for plasmon lasers T2 - International Workshop on Photonic Nanomaterials Y1 - 2010 SN - 978-3-00-031358-5 SP - 36 ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical investigation of optical resonances in circular grating resonators T2 - Silicon Photonics V Y1 - 2010 U6 - https://doi.org/10.1117/12.842061 VL - 7606 SP - 760610 PB - Proc. SPIE ER - TY - CHAP A1 - Burger, Sven A1 - Schmidt, Frank A1 - Zschiedrich, Lin T1 - Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides T2 - Photonic and Phononic Crystal Materials and Devices X Y1 - 2010 U6 - https://doi.org/10.1117/12.841867 VL - 7609 SP - 76091Q PB - Proc. SPIE ER -