TY - GEN A1 - Schädle, Achim A1 - Zschiedrich, Lin A1 - Burger, Sven A1 - Klose, Roland A1 - Schmidt, Frank T1 - Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures N2 - We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer. T3 - ZIB-Report - 06-04 KW - domain decomposition KW - conical diffraction KW - electro-magnetic scattering KW - Maxwell's equations KW - Lithography KW - finite elements Y1 - 2006 U6 - http://nbn-resolving.de/urn/resolver.pl?urn:nbn:de:0297-zib-8984 ER - TY - CHAP A1 - Skibina, Julia A1 - Iliew, Rumen A1 - Bethge, Jens A1 - Bock, Martin A1 - Fischer, Dorit A1 - Beloglazov, Valentin A1 - Wedell, Reiner A1 - Burger, Sven A1 - Steinmeyer, Günter T1 - A chirped photonic crystal fiber for high-fidelity guiding of sub-100 fs pluses T2 - CLEO/QELS Y1 - 2009 U6 - https://doi.org/10.1364/CLEO.2009.CMHH1 SP - CMHH1 ER - TY - CHAP A1 - Burger, Sven A1 - Zschiedrich, Lin A1 - Pomplun, Jan A1 - Schmidt, Frank T1 - Finite-element based electromagnetic field simulations: Benchmark results for isolated structures T2 - Proc. SPIE Y1 - 2013 U6 - https://doi.org/10.1117/12.2026213 VL - 8880 SP - 88801Z ER - TY - CHAP A1 - Pomplun, Jan A1 - Burger, Sven A1 - Rozova, Maria A1 - Zschiedrich, Lin A1 - Schmidt, Frank T1 - Finite element simulation of optical modes in VCSELs T2 - Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on Y1 - 2011 U6 - https://doi.org/10.1109/NUSOD.2011.6041170 SP - 119 EP - 120 ER - TY - CHAP A1 - Malureanu, Radu A1 - de Lasson, Jakob Rosenkrantz A1 - Frandsen, Lars Hagedorn A1 - Gutsche, Philipp A1 - Burger, Sven A1 - Kim, Oleksiy S. A1 - Breinbjerg, Olav A1 - Ivinskaya, Aliaksandra A1 - Wang, Fengwen A1 - Sigmund, Ole A1 - Häyrynen, Teppo A1 - Lavrinenko, Andrei A1 - Mørk, Jesper A1 - Gregersen, Niels T1 - Which Computational Methods Are Good for Analyzing Large Photonic Crystal Membrane Cavities? T2 - 20th International Conference on Transparent Optical Networks (ICTON) Y1 - 2018 U6 - https://doi.org/10.1109/ICTON.2018.8473951 ER - TY - JOUR A1 - Becker, Christiane A1 - Burger, Sven A1 - Jäger, Klaus T1 - Nanooptische Simulationen für optoelektronische Anwendungen JF - Photonik: Fachzeitschrift für die optischen Technologien Y1 - 2019 SN - 1432-9778 VL - 2019 IS - 2 SP - 42 EP - 45 ER - TY - CHAP A1 - Lassila, Antti A1 - Shpak, Maksim A1 - Vaigu, A. A1 - Smid, M. A1 - Velasco, A. A1 - Pokatilov, A. A1 - Fatadin, I. A1 - Ferguson, R. A1 - Robinson, D. A1 - Walbaum, T. A1 - Burger, Sven A1 - Haapalainen, Mertsi A1 - Vahimaa, P. A1 - Lukner, H. A1 - Pernice, W. A1 - Pitwon, R. A1 - Deninger, A. A1 - Morel, Jacques A1 - Castagna, Natascia A1 - Peters, O. A1 - Husu, H. T1 - Joint research for photonics fibres, waveguides and interconnects T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 25 ER - TY - CHAP A1 - Zschiedrich, Lin A1 - Schmidt, Frank A1 - Pomplun, Jan A1 - Burger, Sven T1 - Finite elements for nano-optics applications T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 178 ER - TY - CHAP A1 - Barth, Carlo A1 - Roder, Sebastian A1 - Brodoceanu, Daniel A1 - Kraus, Tobias A1 - Burger, Sven A1 - Hammerschmidt, Martin A1 - Schmidt, Frank A1 - Becker, Christiane T1 - Increased fluorescence of PbS quantum dots on photonic crystal slab structures T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 181 ER - TY - CHAP A1 - Hammerschmidt, Martin A1 - Barth, Carlo A1 - Burger, Sven A1 - Becker, Christiane A1 - Schmidt, Frank T1 - Determining 2D photonic crystal geometries from reflectance spectra with a reduced basis method T2 - Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM) Y1 - 2016 SN - 978-1-5108-4796-5 SP - 281 ER -