<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1943</id>
    <completedYear>2011</completedYear>
    <publishedYear>2011</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>319</pageFirst>
    <pageLast>323</pageLast>
    <pageNumber/>
    <edition/>
    <issue>1</issue>
    <volume>1395</volume>
    <type>article</type>
    <publisherName>AIP</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Joint Research on Scatterometry and AFM Wafer Metrology</title>
    <parentTitle language="eng">AIP Conference Proceedings</parentTitle>
    <identifier type="doi">10.1063/1.3657910</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Bernd Bodermann</author>
    <author>Egbert Buhr</author>
    <author>Hans-Ulrich Danzebrink</author>
    <author>Markus Bär</author>
    <author>Frank Scholze</author>
    <author>Michael Krumrey</author>
    <author>Matthias Wurm</author>
    <author>Petr Klapetek</author>
    <author>Poul-Erik Hansen</author>
    <author>Virpi Korpelainen</author>
    <author>Marijn van Veghel</author>
    <author>Andrew Yacoot</author>
    <author>Samuli Siitonen</author>
    <author>Omar El Gawhary</author>
    <author>Sven Burger</author>
    <author>Toni Saastamoinen</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
  </doc>
</export-example>
