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  <doc>
    <id>898</id>
    <completedYear/>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>reportzib</type>
    <publisherName/>
    <publisherPlace/>
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    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2006-02-06</completedDate>
    <publishedDate>2006-02-06</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures</title>
    <abstract language="eng">We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.</abstract>
    <identifier type="serial">06-04</identifier>
    <identifier type="opus3-id">898</identifier>
    <identifier type="urn">urn:nbn:de:0297-zib-8984</identifier>
    <identifier type="doi">/10.1016/j.jcp.2007.04.017</identifier>
    <enrichment key="SourceTitle">Appeared in: Journal of Computational Physics 226 (2007) 477-493</enrichment>
    <author>Achim Schädle</author>
    <author>Lin Zschiedrich</author>
    <author>Sven Burger</author>
    <author>Roland Klose</author>
    <author>Frank Schmidt</author>
    <series>
      <title>ZIB-Report</title>
      <number>06-04</number>
    </series>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>domain decomposition</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>conical diffraction</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>electro-magnetic scattering</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Maxwell's equations</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Lithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>finite elements</value>
    </subject>
    <collection role="ddc" number="000">Informatik, Informationswissenschaft, allgemeine Werke</collection>
    <collection role="pacs" number="02.70.Dh">Finite-element and Galerkin methods</collection>
    <collection role="pacs" number="03.50.De">Classical electromagnetism, Maxwell equations (for applied classical electromagnetism, see 41.20.-q)</collection>
    <collection role="pacs" number="42.25.Fx">Diffraction and scattering</collection>
    <collection role="msc" number="65N55">Multigrid methods; domain decomposition</collection>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <file>https://opus4.kobv.de/opus4-zib/files/898/ZR-06-04.pdf</file>
    <file>https://opus4.kobv.de/opus4-zib/files/898/ZR-06-04.ps</file>
  </doc>
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