<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>9193</id>
    <completedYear/>
    <publishedYear>2023</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>PC1261907</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>PC12619</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Forward simulation of coherent beams on grating structures for coherent scatterometry</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2673231</identifier>
    <identifier type="arxiv">2309.06109</identifier>
    <enrichment key="PeerReviewed">no</enrichment>
    <enrichment key="opus.source">publish</enrichment>
    <author>Martin Hammerschmidt</author>
    <submitter>Sven Burger</submitter>
    <author>Lin Zschiedrich</author>
    <author>Lauryna Siaudinyté</author>
    <author>Phillip Manley</author>
    <author>Philipp-Immanuel Schneider</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="persons" number="manley">Manley, Phillip</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
  </doc>
</export-example>
