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    <id>8231</id>
    <completedYear/>
    <publishedYear>2020</publishedYear>
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    <language>eng</language>
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    <pageLast/>
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    <type>researchdata</type>
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    <belongsToBibliography>0</belongsToBibliography>
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    <title language="eng">Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]</title>
    <identifier type="doi">10.24433/CO.0953516.v2</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
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    <author>Mika Pflüger</author>
    <submitter>Sven Burger</submitter>
    <author>R Joseph Kline</author>
    <author>Analía Fernández Herrero</author>
    <author>Martin Hammerschmidt</author>
    <author>Victor Soltwisch</author>
    <author>Michael Krumrey</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
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