<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>5354</id>
    <completedYear/>
    <publishedYear>2015</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>15002</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>10</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry</title>
    <parentTitle language="eng">J. Eur. Opt. Soc.-Rapid</parentTitle>
    <identifier type="doi">10.2971/jeos.2015.15002</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Peter Petrik</author>
    <submitter>Sven Burger</submitter>
    <author>Nitish Kumar</author>
    <author>Miklos Fried</author>
    <author>Bálint Fodor</author>
    <author>György Juhász</author>
    <author>Silvania Pereira</author>
    <author>Sven Burger</author>
    <author>H. Paul Urbach</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="projects" number="ECMath-SE6">ECMath-SE6</collection>
  </doc>
</export-example>
