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    <id>1987</id>
    <completedYear>2007</completedYear>
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    <language>eng</language>
    <pageFirst>66170V</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
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    <volume>6617</volume>
    <type>conferenceobject</type>
    <publisherName>Proc. SPIE</publisherName>
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    <title language="eng">3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method</title>
    <parentTitle language="eng">Modeling Aspects in Optical Metrology</parentTitle>
    <identifier type="doi">10.1117/12.726236</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Sven Burger</author>
    <editor>Harald Bosse</editor>
    <author>Lin Zschiedrich</author>
    <author>Frank Schmidt</author>
    <author>Roderick Köhle</author>
    <author>Thomas Henkel</author>
    <author>Bernd Küchler</author>
    <author>Christoph Nölscher</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
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  <doc>
    <id>1988</id>
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    <language>eng</language>
    <pageFirst>6630</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
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    <volume>6730</volume>
    <type>conferenceobject</type>
    <publisherName>Proc. SPIE</publisherName>
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    <title language="eng">EMF Simulations of Isolated and Periodic 3D Photomask Patterns</title>
    <parentTitle language="eng">Photomask Technology</parentTitle>
    <identifier type="url">http://arxiv.org/pdf/0709.3934</identifier>
    <author>Sven Burger</author>
    <author>Lin Zschiedrich</author>
    <author>Frank Schmidt</author>
    <author>Roderick Köhle</author>
    <author>Bernd Küchler</author>
    <author>Christoph Nölscher</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
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    <collection role="persons" number="burger">Burger, Sven</collection>
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