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    <title language="eng">Quasi-bound states in the continuum for deep subwavelength structural information retrieval for DUV nano-optical polarizers</title>
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    <author>Thomas Siefke</author>
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    <author>Carol Hurtado</author>
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    <author>Walter Dickmann</author>
    <author>Tim Käseberg</author>
    <author>Jan Meyer</author>
    <author>Sven Burger</author>
    <author>Uwe Zeitner</author>
    <author>Bernd Bodermann</author>
    <author>Stefanie Kroker</author>
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    <title language="eng">Joint Research on Scatterometry and AFM Wafer Metrology</title>
    <parentTitle language="eng">AIP Conference Proceedings</parentTitle>
    <identifier type="doi">10.1063/1.3657910</identifier>
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    <author>Bernd Bodermann</author>
    <author>Egbert Buhr</author>
    <author>Hans-Ulrich Danzebrink</author>
    <author>Markus Bär</author>
    <author>Frank Scholze</author>
    <author>Michael Krumrey</author>
    <author>Matthias Wurm</author>
    <author>Petr Klapetek</author>
    <author>Poul-Erik Hansen</author>
    <author>Virpi Korpelainen</author>
    <author>Marijn van Veghel</author>
    <author>Andrew Yacoot</author>
    <author>Samuli Siitonen</author>
    <author>Omar El Gawhary</author>
    <author>Sven Burger</author>
    <author>Toni Saastamoinen</author>
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    <title language="eng">First steps towards a scatterometry reference standard</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.929903</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Bernd Bodermann</author>
    <author>Poul-Erik Hansen</author>
    <author>Sven Burger</author>
    <author>Mark-Alexander Henn</author>
    <author>Hermann Gross</author>
    <author>Markus Bär</author>
    <author>Frank Scholze</author>
    <author>Johannes Endres</author>
    <author>Matthias Wurm</author>
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  <doc>
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    <language>eng</language>
    <pageFirst>92310M</pageFirst>
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    <title language="eng">Determination of line profiles on photomasks using DUV, EUV and X-ray scattering</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2065941</identifier>
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    <author>Frank Scholze</author>
    <submitter>Sven Burger</submitter>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <author>Johannes Endres</author>
    <author>Anton Haase</author>
    <author>Michael Krumrey</author>
    <author>Christian Laubis</author>
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    <author>Albrecht Ullrich</author>
    <author>Jan Wernecke</author>
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    <title language="eng">Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion</title>
    <abstract language="eng">We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.</abstract>
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    <identifier type="urn">urn:nbn:de:0297-zib-64704</identifier>
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    <author>Martin Hammerschmidt</author>
    <submitter>Martin Hammerschmidt</submitter>
    <author>Martin Weiser</author>
    <author>Xavier Garcia Santiago</author>
    <author>Lin Zschiedrich</author>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <series>
      <title>ZIB-Report</title>
      <number>17-37</number>
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    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>computational metrology</value>
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    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical metrology</value>
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    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>computational lithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>nanolithography</value>
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    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>finite- element methods</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>nanooptics</value>
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    <collection role="ccs" number="J.">Computer Applications</collection>
    <collection role="pacs" number="40.00.00">ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS</collection>
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    <title language="eng">Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2270596</identifier>
    <identifier type="arxiv">1707.08467</identifier>
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    <author>Martin Hammerschmidt</author>
    <submitter>Sven Burger</submitter>
    <author>Martin Weiser</author>
    <author>Xavier Garcia Santiago</author>
    <author>Lin Zschiedrich</author>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
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    <title language="eng">Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method</title>
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    <identifier type="doi">10.1051/epjconf/202430902016</identifier>
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    <author>Deshabrato Mukherjee</author>
    <submitter>Sven Burger</submitter>
    <author>Sven Burger</author>
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    <author>Jeetendra Gour</author>
    <author>Bernd Bodermann</author>
    <author>Peter Petrik</author>
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    <title language="eng">T-matrix representation of optical scattering response: Suggestion for a data format</title>
    <parentTitle language="eng">J. Quant. Spectrosc. Radiat. Transf.</parentTitle>
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    <identifier type="arxiv">2408.10727</identifier>
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    <author>Jungho Mun</author>
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    <author>Lukas Pflug</author>
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    <author>Junsuk Rho</author>
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    <author>Jorge Olmos Trigo</author>
    <author>Frank Tristram</author>
    <author>Nikolaos L. Tsitsas</author>
    <author>Renaud Vallée</author>
    <author>Kevin Vynck</author>
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    <author>Thomas Wriedt</author>
    <author>Vassilios Yannopapas</author>
    <author>Maxim A. Yurkin</author>
    <author>Grigorios P. Zouros</author>
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    <title language="eng">Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty</title>
    <parentTitle language="eng">ACS Omega</parentTitle>
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    <author>Deshabrato Mukherjee</author>
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    <author>Bernd Bodermann</author>
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    <title language="eng">Reconstructing phase aberrations for high-precision dimensional microscopy</title>
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    <identifier type="doi">10.1117/12.2620762</identifier>
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    <author>Philipp-Immanuel Schneider</author>
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    <author>Phillip Manley</author>
    <author>Jan Krüger</author>
    <author>Lin Zschiedrich</author>
    <author>Rainer Köning</author>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="persons" number="manley">Manley, Phillip</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
  </doc>
</export-example>
