<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>7292</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>482</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>6</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Achiral, Helicity Preserving, and Resonant Structures for Enhanced Sensing of Chiral Molecules</title>
    <parentTitle language="eng">ACS Photonics</parentTitle>
    <identifier type="doi">10.1021/acsphotonics.8b01454</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Florian Graf</author>
    <submitter>Sven Burger</submitter>
    <author>Joshua Feis</author>
    <author>Xavier Garcia Santiago</author>
    <author>Martin Wegener</author>
    <author>Carsten Rockstuhl</author>
    <author>Ivan Fernandez-Corbaton</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>7044</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>2726</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>6</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2019-09-17</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction</title>
    <parentTitle language="eng">ACS Photonics</parentTitle>
    <identifier type="doi">10.1021/acsphotonics.9b00706</identifier>
    <identifier type="arxiv">1809.06674</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Philipp-Immanuel Schneider</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Victor Soltwisch</author>
    <author>Martin Hammerschmidt</author>
    <author>Sven Burger</author>
    <author>Carsten Rockstuhl</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="projects" number="CNO-BECOME">CNO-BECOME</collection>
  </doc>
  <doc>
    <id>6980</id>
    <completedYear/>
    <publishedYear>2020</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>158</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>12</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Role of Geometric Shape in Chiral Optics</title>
    <parentTitle language="eng">Symmetry</parentTitle>
    <identifier type="doi">10.3390/sym12010158</identifier>
    <identifier type="arxiv">1808.01855</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Philipp Gutsche</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Philipp-Immanuel Schneider</author>
    <author>Kevin McPeak</author>
    <author>Manuel Nieto-Vesperinas</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="projects" number="CNO-CHI-1">CNO-CHI-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
  </doc>
  <doc>
    <id>6988</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>045406</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>99</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Decomposition of scattered electromagnetic fields into vector spherical wave functions on surfaces with general shapes</title>
    <parentTitle language="eng">Phys. Rev. B</parentTitle>
    <identifier type="doi">10.1103/PhysRevB.99.045406</identifier>
    <identifier type="arxiv">1808.02315</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <enrichment key="AcceptedDate">2018-12-12</enrichment>
    <author>Xavier Garcia Santiago</author>
    <submitter>Sven Burger</submitter>
    <author>Martin Hammerschmidt</author>
    <author>Sven Burger</author>
    <author>Carsten Rockstuhl</author>
    <author>Ivan Fernandez-Corbaton</author>
    <author>Lin Zschiedrich</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="projects" number="CNO-BECOME">CNO-BECOME</collection>
  </doc>
  <doc>
    <id>6877</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1164</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>16</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Light Management for Engineering Luminescence in Nanoscale Environments By Numerical Optimization</title>
    <parentTitle language="eng">The Electrochemical Society, Meeting Abstracts</parentTitle>
    <identifier type="issn">2151-2043</identifier>
    <identifier type="doi">10.1149/MA2018-01/16/1164</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Philipp-Immanuel Schneider</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Felix Binkowski</author>
    <author>Philipp Gutsche</author>
    <author>Theresa Höhne</author>
    <author>Martin Hammerschmidt</author>
    <author>Lin Zschiedrich</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="binkowski">Binkowski, Felix</collection>
    <collection role="persons" number="hoehne">Höhne, Theresa</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="projects" number="CNO-CHI-1">CNO-CHI-1</collection>
    <collection role="projects" number="ECMath-OT9">ECMath-OT9</collection>
  </doc>
  <doc>
    <id>6894</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1069407</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>10694</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2315468</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Martin Hammerschmidt</author>
    <submitter>Sven Burger</submitter>
    <author>Philipp-Immanuel Schneider</author>
    <author>Xavier Garcia Santiago</author>
    <author>Lin Zschiedrich</author>
    <author>Martin Weiser</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="weiser">Weiser, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>6875</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>6</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Optimization of quantum optical devices with machine learning</title>
    <parentTitle language="eng">XXVI International Workshop on Optical Wave &amp; Waveguide Theory and Numerical Modelling, Proceedings</parentTitle>
    <identifier type="isbn">978-3-921823-98-9</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Philipp-Immanuel Schneider</author>
    <submitter>Sven Burger</submitter>
    <author>Lin Zschiedrich</author>
    <author>Xavier Garcia Santiago</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>7824</id>
    <completedYear/>
    <publishedYear>2020</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>033201</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>124</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Helicity-Preserving Optical Cavity Modes for Enhanced Sensing of Chiral Molecules</title>
    <parentTitle language="eng">Phys. Rev. Lett.</parentTitle>
    <identifier type="doi">10.1103/PhysRevLett.124.033201</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Joshua Feis</author>
    <submitter>Sven Burger</submitter>
    <author>Dominik Beutel</author>
    <author>Julian Köpfler</author>
    <author>Xavier Garcia Santiago</author>
    <author>Carsten Rockstuhl</author>
    <author>Martin Wegener</author>
    <author>Ivan Fernandez-Corbaton</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
  </doc>
  <doc>
    <id>7751</id>
    <completedYear/>
    <publishedYear>2019</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Spectral Expansion of the Scattering Response of Resonant Nanostructures</title>
    <parentTitle language="eng">EOS Topical Meeting on Diffractive Optics</parentTitle>
    <identifier type="isbn">978-952-68553-8-7</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">true</enrichment>
    <author>Felix Binkowski</author>
    <submitter>Sven Burger</submitter>
    <editor>Kimmo Saastamoinen</editor>
    <author>Lin Zschiedrich</author>
    <author>Philipp-Immanuel Schneider</author>
    <author>Martin Hammerschmidt</author>
    <author>Xavier Garcia Santiago</author>
    <author>Fridtjof Betz</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="persons" number="binkowski">Binkowski, Felix</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="persons" number="betz">Betz, Fridtjof</collection>
    <collection role="projects" number="CNO-BECOME">CNO-BECOME</collection>
    <collection role="projects" number="CNO-SOLARMATH-1">CNO-SOLARMATH-1</collection>
  </doc>
  <doc>
    <id>7955</id>
    <completedYear/>
    <publishedYear>2020</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>2000192</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>3</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Modeling Optical Materials at the Single Scatterer Level: The Transition from Homogeneous to Heterogeneous Materials</title>
    <parentTitle language="eng">Adv. Theory Simul.</parentTitle>
    <identifier type="doi">10.1002/adts.202000192</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Daniel Werdehausen</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Sven Burger</author>
    <author>Isabelle Staude</author>
    <author>Thomas Pertsch</author>
    <author>Carsten Rockstuhl</author>
    <author>Manuel Decker</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="projects" number="MODAL-Gesamt">MODAL-Gesamt</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
    <collection role="projects" number="CNO-MODAL-NANOLAB">CNO-MODAL-NANOLAB</collection>
  </doc>
  <doc>
    <id>7954</id>
    <completedYear/>
    <publishedYear>2021</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>167</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>39</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>2020-09-11</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Bayesian optimization with improved scalability and derivative information for efficient design of nanophotonic structures</title>
    <parentTitle language="eng">J. Light. Technol.</parentTitle>
    <identifier type="doi">10.1109/JLT.2020.3023450</identifier>
    <identifier type="arxiv">2101.02972</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Xavier Garcia Santiago</author>
    <submitter>Sven Burger</submitter>
    <author>Sven Burger</author>
    <author>Carsten Rockstuhl</author>
    <author>Philipp-Immanuel Schneider</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="projects" number="MODAL-Gesamt">MODAL-Gesamt</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="projects" number="CNO-SOLARMATH-1">CNO-SOLARMATH-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
    <collection role="projects" number="CNO-MODAL-NANOLAB">CNO-MODAL-NANOLAB</collection>
  </doc>
  <doc>
    <id>6721</id>
    <completedYear/>
    <publishedYear>2018</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>012003</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>963</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Shape design of a reflecting surface using Bayesian Optimization</title>
    <parentTitle language="eng">J. Phys.: Conf. Ser.</parentTitle>
    <identifier type="doi">10.1088/1742-6596/963/1/012003</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Xavier Garcia Santiago</author>
    <submitter>Sven Burger</submitter>
    <author>Philipp-Immanuel Schneider</author>
    <author>Carsten Rockstuhl</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>8117</id>
    <completedYear/>
    <publishedYear>2020</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>041413</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>7</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">On enhanced sensing of chiral molecules in optical cavities</title>
    <parentTitle language="eng">Appl. Phys. Rev.</parentTitle>
    <identifier type="doi">10.1063/5.0025006</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <enrichment key="opus.source">publish</enrichment>
    <author>Philip Scott</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Dominik Beutel</author>
    <author>Carsten Rockstuhl</author>
    <author>Martin Wegener</author>
    <author>Ivan Fernandez-Corbaton</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
  </doc>
  <doc>
    <id>6470</id>
    <completedYear/>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>reportzib</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>2017-07-25</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion</title>
    <abstract language="eng">We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.</abstract>
    <identifier type="issn">1438-0064</identifier>
    <identifier type="urn">urn:nbn:de:0297-zib-64704</identifier>
    <enrichment key="SourceTitle">Appeared in: Proc. SPIE 10330, Modeling Aspects in Optical Metrology, (2017)</enrichment>
    <author>Martin Hammerschmidt</author>
    <submitter>Martin Hammerschmidt</submitter>
    <author>Martin Weiser</author>
    <author>Xavier Garcia Santiago</author>
    <author>Lin Zschiedrich</author>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <series>
      <title>ZIB-Report</title>
      <number>17-37</number>
    </series>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>computational metrology</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>optical metrology</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>computational lithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>nanolithography</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>finite- element methods</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>nanooptics</value>
    </subject>
    <collection role="ccs" number="J.">Computer Applications</collection>
    <collection role="pacs" number="40.00.00">ELECTROMAGNETISM, OPTICS, ACOUSTICS, HEAT TRANSFER, CLASSICAL MECHANICS, AND FLUID DYNAMICS</collection>
    <collection role="msc" number="78-XX">OPTICS, ELECTROMAGNETIC THEORY (For quantum optics, see 81V80)</collection>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="weiser">Weiser, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <file>https://opus4.kobv.de/opus4-zib/files/6470/ZR-17-37.pdf</file>
  </doc>
  <doc>
    <id>6441</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1033004</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>10330</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2270596</identifier>
    <identifier type="arxiv">1707.08467</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <enrichment key="PreprintUrn">urn:nbn:de:0297-zib-64704</enrichment>
    <author>Martin Hammerschmidt</author>
    <submitter>Sven Burger</submitter>
    <author>Martin Weiser</author>
    <author>Xavier Garcia Santiago</author>
    <author>Lin Zschiedrich</author>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="hammerschmidt">Hammerschmidt, Martin</collection>
    <collection role="persons" number="weiser">Weiser, Martin</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>6442</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>103350O</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>10335</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Global optimization of complex optical structures using Bayesian optimization based on Gaussian processes</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2270609</identifier>
    <identifier type="arxiv">1707.08479</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Philipp-Immanuel Schneider</author>
    <submitter>Sven Burger</submitter>
    <author>Xavier Garcia Santiago</author>
    <author>Carsten Rockstuhl</author>
    <author>Sven Burger</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="schneider">Schneider, Philipp-Immanuel</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>6497</id>
    <completedYear/>
    <publishedYear>2017</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>4075</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>42</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Measuring the electromagnetic chirality of 2D arrays under normal illumination</title>
    <parentTitle language="eng">Opt. Lett.</parentTitle>
    <identifier type="doi">10.1364/OL.42.004075</identifier>
    <identifier type="arxiv">1912.07033</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Xavier Garcia Santiago</author>
    <submitter>Sven Burger</submitter>
    <author>Sven Burger</author>
    <author>Carsten Rockstuhl</author>
    <author>Ivan Fernandez-Corbaton</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
  </doc>
  <doc>
    <id>8080</id>
    <completedYear/>
    <publishedYear>2021</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>doctoralthesis</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation>Karlsruher Institut für Technologie</creatingCorporation>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>2021-04-01</publishedDate>
    <thesisDateAccepted>2020-11-27</thesisDateAccepted>
    <title language="eng">Numerical methods for shape optimization of photonic nanostructures</title>
    <identifier type="doi">10.5445/IR/1000131006</identifier>
    <advisor>Carsten Rockstuhl</advisor>
    <author>Xavier Garcia Santiago</author>
    <submitter>Sven Burger</submitter>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="projects" number="NOLOSS-1">NOLOSS-1</collection>
    <collection role="institutes" number="MSoCP">Modeling and Simulation of Complex Processes</collection>
    <thesisGrantor>Karlsruher Institut für Technologie</thesisGrantor>
  </doc>
</export-example>
