<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>5114</id>
    <completedYear/>
    <publishedYear>2014</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>92310M</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>9231</volume>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Determination of line profiles on photomasks using DUV, EUV and X-ray scattering</title>
    <parentTitle language="eng">Proc. SPIE</parentTitle>
    <identifier type="doi">10.1117/12.2065941</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Frank Scholze</author>
    <submitter>Sven Burger</submitter>
    <author>Bernd Bodermann</author>
    <author>Sven Burger</author>
    <author>Johannes Endres</author>
    <author>Anton Haase</author>
    <author>Michael Krumrey</author>
    <author>Christian Laubis</author>
    <author>Victor Soltwisch</author>
    <author>Albrecht Ullrich</author>
    <author>Jan Wernecke</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="projects" number="Matheon-D23">Matheon-D23</collection>
  </doc>
</export-example>
