<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1975</id>
    <completedYear>2010</completedYear>
    <publishedYear>2010</publishedYear>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>78230E</pageFirst>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>7823</volume>
    <type>conferenceobject</type>
    <publisherName>Proc. SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Reduced basis method for source mask optimization</title>
    <parentTitle language="eng">Photomask Technology</parentTitle>
    <identifier type="doi">10.1117/12.866101</identifier>
    <enrichment key="PeerReviewed">yes</enrichment>
    <author>Jan Pomplun</author>
    <author>Lin Zschiedrich</author>
    <author>Sven Burger</author>
    <author>Frank Schmidt</author>
    <author>Jacek Tyminski</author>
    <author>Donis Flagello</author>
    <author>N. Toshiharu</author>
    <collection role="institutes" number="num">Numerical Mathematics</collection>
    <collection role="institutes" number="compnano">Computational Nano Optics</collection>
    <collection role="persons" number="burger">Burger, Sven</collection>
    <collection role="persons" number="zschiedrich">Zschiedrich, Lin Werner</collection>
  </doc>
</export-example>
