@article{SchneiderManleyKruegeretal.2022, author = {Schneider, Philipp-Immanuel and Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and K{\"o}ning, Rainer and Bodermann, Bernd and Burger, Sven}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, volume = {12137}, journal = {Proc. SPIE}, doi = {10.1117/12.2620762}, pages = {121370I}, year = {2022}, language = {en} }