@misc{PfluegerKlineFernandezHerreroetal.2020, author = {Pfl{\"u}ger, Mika and Kline, R Joseph and Fern{\´a}ndez Herrero, Anal{\´i}a and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]}, doi = {10.24433/CO.0953516.v2}, year = {2020}, language = {en} }