@misc{HohageSchmidtZschiedrich, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {Solving time-harmonic scattering problems based on the pole condition: Convergence of the PML method}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-6494}, number = {01-23}, abstract = {In this paper we study the PML method for Helmholtz-type scattering problems with radially symmetric potential. The PML method consists in surrounding the computational domain by a \textbf{P}erfectly \textbf{M}atched sponge \textbf{L}ayer. We prove that the approximate solution obtained by the PML method converges exponentially fast to the true solution in the computational domain as the thickness of the sponge layer tends to infinity. This is a generalization of results by Lassas and Somersalo based on boundary integral eqaution techniques. Here we use techniques based on the pole condition instead. This makes it possible to treat problems without an explicitly known fundamental solution.}, language = {en} } @misc{BurgerKloseSchaedleetal., author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {HelmPole - A finite element solver for scattering problems on unbounded domains: Implementation based on PML}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-7609}, number = {03-38}, abstract = {The solution of scattering problems described by the Helmholtz equation on unbounded domains is of importance for a wide variety of applications, for example in electromagnetics and acoustics. An implementation of a solver for scattering problems based on the programming language Matlab is introduced. The solver relies on the finite-element-method and on the perfectly-matched-layer-method, which allows for the simulation of scattering problems on complex geometries surrounded by inhomogeneous exterior domains. This report gives a number of detailed examples and can be understood as a user manual to the freely accessible code of the solver HelmPole.}, language = {en} } @misc{HohageSchmidtZschiedrich, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {A new method for the solution of scattering problems}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-6683}, number = {02-01}, abstract = {We present a new efficient algorithm for the solution of direct time-harmonic scattering problems based on the Laplace transform. This method does not rely on an explicit knowledge of a Green function or a series representation of the solution, and it can be used for the solution of problems with radially symmetric potentials and problems with waveguides. The starting point is an alternative characterization of outgoing waves called \emph{pole condition}, which is equivalent to Sommerfeld's radiation condition for problems with radially symmetric potentials. We obtain a new representation formula, which can be used for a numerical evaluation of the exterior field in a postprocessing step. Based on previous theoretical studies, we discuss the numerical realization of our algorithm and compare its performance to the PML method.}, language = {en} } @misc{ZschiedrichKloseSchaedleetal., author = {Zschiedrich, Lin and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A new Finite Element realization of the Perfectly Matched Layer Method for Helmholtz scattering problems on polygonal domains in 2D}, doi = {10.1016/j.cam.2005.03.047}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-7662}, number = {03-44}, abstract = {In this paper we propose a new finite element realization of the Perfectly Matched Layer method (PML-method). Our approach allows to deal with arbitrary shaped polygonal domains and with certain types of inhomogeneous exterior domains. Among the covered inhomogeneities are open waveguide structures playing an essential role in integrated optics. We give a detailed insight to implementation aspects. Numerical examples show exponential convergence behavior to the exact solution with the thickness of the PML sponge layer.}, language = {en} } @misc{RuprechtSchaedleSchmidtetal., author = {Ruprecht, Daniel and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Transparent boundary conditons for time-dependent problems}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-9558}, number = {07-12}, abstract = {A new approach to derive transparent boundary conditions (TBCs) for wave, Schr{\"o}dinger, heat and drift-diffusion equations is presented. It relies on the pole condition and distinguishes between physical reasonable and unreasonable solutions by the location of the singularities of the spatial Laplace transform of the exterior solution. To obtain a numerical algorithm, a M{\"o}bius transform is applied to map the Laplace transform onto the unit disc. In the transformed coordinate the solution is expanded into a power series. Finally, equations for the coefficients of the power series are derived. These are coupled to the equation in the interior, and yield transparent boundary conditions. Numerical results are presented in the last section, showing that the error introduced by the new approximate TBCs decays exponentially in the number of coefficients.}, language = {en} } @misc{SchaedleZschiedrichBurgeretal., author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @misc{SchaedleZschiedrich, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {Additive Schwarz method for scattering problems using the PML method at interfaces}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8613}, number = {05-27}, abstract = {Scattering problems in integrated optics can be modeled in simple cases by the Helmholtz equation. The computational domain is truncated by a non-reflecting boundary condition. We investigate Schwarz algorithms with a sort of DtN operator, realized by the PML-method, at the interfaces of the sub-domains as an iterative solver.}, language = {en} } @misc{SchmidtFrieseZschiedrichetal., author = {Schmidt, Frank and Friese, Tilmann and Zschiedrich, Lin and Deuflhard, Peter}, title = {Adaptive Multigrid Methods for the Vectorial Maxwell Eigenvalue Problem for Optical Waveguide Design}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-6228}, number = {00-54}, abstract = {This paper has been motivated by the need for a fast robust adaptive multigrid method to solve the vectorial Maxwell eigenvalue problem arising from the design of optical chips. Our nonlinear multigrid methods are based on a previous method for the scalar Helmholtz equation, which must be modified to cope with the null space of the Maxwell operator due to the divergence condition. We present two different approaches. First, we present a multigrid algorithm based on an edge element discretization of time-harmonic Maxwell's equations, including the divergence condition. Second, an explicit elimination of longitudinal magnetic components leads to a nodal discretization known to avoid discrete \emph{spurious modes} also and a vectorial eigenvalue problem, for which we present a multigrid solver. Numerical examples show that the edge element discretization clearly outperforms the nodal element approach.}, language = {en} } @misc{HohageSchmidtZschiedrich, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {Solving time-harmonic scattering problems based on the condition: Theory}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-6279}, number = {01-01}, abstract = {The pole condition is a general concept for the theoretical analysis and the numerical solution of a variety of wave propagation problems. It says that the Laplace transform of the physical solution in radial direction has no poles in the lower complex half-plane. In the present paper we show that for the Helmholtz equation with a radially symmetric potential the pole condition is equivalent to Sommerfeld's radiation condition. Moreover, a new representation formula based on the pole condition is derived and used to prove existence, uniqueness and asymptotic properties of solutions. This lays the foundations of a promising new algorithm to solve time-harmonic scattering problems numerically and provides a new approach for analyzing existing algorithms such as the Perfectly Matched Layer (PML) method and the Bayliss-Gunzburger-Turkel (BGT) algorithm.}, language = {en} } @incollection{BurgerKloseSchaedleetal.2006, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Adaptive FEM solver for the computation of electromagnetic eigenmodes in 3D photonic crystal structures}, series = {Scientific Computing in Electrical Engineering}, booktitle = {Scientific Computing in Electrical Engineering}, publisher = {Springer Verlag}, doi = {10.1007/978-3-540-32862-9_24}, pages = {169 -- 175}, year = {2006}, language = {en} } @inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, series = {Microtechnologies for the New Millenium}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2003, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems}, series = {Dig. LEOS/IEEE 2003 Summer Topicals}, booktitle = {Dig. LEOS/IEEE 2003 Summer Topicals}, doi = {10.1109/LEOSST.2003.1224282}, pages = {75}, year = {2003}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, series = {International Workshop on Photonic Nanomaterials}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, series = {Silicon Photonics V}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, series = {Photonic and Phononic Crystal Materials and Devices X}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Nanophotonics}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrich2009, author = {Burger, Sven and Zschiedrich, Lin}, title = {Numerical Investigation of Silicon-on-Insulator 1D Photonic Crystal Microcavities}, series = {Theoretical and computational nanooptics}, volume = {1176}, booktitle = {Theoretical and computational nanooptics}, editor = {Chigrin, Dmitry}, publisher = {AIP}, doi = {10.1063/1.3253915}, pages = {43 -- 45}, year = {2009}, language = {en} } @incollection{BurgerZschiedrichKettneretal.2008, author = {Burger, Sven and Zschiedrich, Lin and Kettner, Benjamin and Schmidt, Frank}, title = {FEM simulation of light scattering by nonspherical objects}, series = {Mie Theory 1908 - 2008}, booktitle = {Mie Theory 1908 - 2008}, editor = {Hergert, W. and Wriedt, T.}, publisher = {Universit{\"a}t Bremen}, pages = {82 -- 83}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichKloseetal.2005, author = {Burger, Sven and Zschiedrich, Lin and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Enkrich, Christian and Linden, S. and Wegener, M. and Soukoulis, C.}, title = {Numerical Investigation of Light Scattering off Split-Ring Resonators}, series = {Metamaterials}, volume = {5955}, booktitle = {Metamaterials}, editor = {Szoplik, T. and {\"O}zbay, E. and Soukoulis, C. and Zheludev, N.}, publisher = {Proc. SPIE}, doi = {10.1117/12.622184}, pages = {18 -- 26}, year = {2005}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, series = {Integrated Optics: Devices, Materials, and Technologies XIV}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, series = {Integrated Photonics and Nanophotonics Research and Applications}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @article{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM Simulation of Plasmon Laser Resonances}, series = {AIP Conference Proceedings}, volume = {1281}, journal = {AIP Conference Proceedings}, publisher = {AIP}, doi = {10.1063/1.3498131}, pages = {1613 -- 1616}, year = {2010}, language = {en} } @inproceedings{BurgerKloseMaerzetal.2004, author = {Burger, Sven and Klose, Roland and M{\"a}rz, Reinhard and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Efficient Finite Element Methods for the Design of Microoptical Components}, series = {Proc. Microoptics Conf. 2004}, booktitle = {Proc. Microoptics Conf. 2004}, year = {2004}, language = {en} } @inproceedings{BurgerKloseSchaedleetal.2005, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM modelling of 3D photonic crystals and photonic crystal waveguides}, series = {Integrated Optics : Devices, Materials and Technologies IX}, volume = {5728}, booktitle = {Integrated Optics : Devices, Materials and Technologies IX}, editor = {Sidorin, Y. and W{\"a}chter, Christoph}, publisher = {Proc. SPIE}, doi = {10.1117/12.585895}, pages = {164 -- 173}, year = {2005}, language = {en} } @phdthesis{Zschiedrich, author = {Zschiedrich, Lin}, title = {Transparent boundary conditions for Maxwell's equations: Numerical concepts beyond the PML method}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:188-fudissthesis000000013994-8}, abstract = {Optical technologies are ubiquitously used in hi-tech devices. As a common feature of such devices one finds structures with dimensions in the order of the wavelength of the used light. To design and produce such devices, the wave nature of light must be taken into account. Accordingly, robust simulation tools are required which are based on rigorously solving Maxwell's equations, the governing equations of light propagation within macroscopic media. This thesis contributes to the modeling and the numerical computation of light scattering problems: Light scattering problems are typically posed on the entire space. The Perfectly-Matched -Layer method (PML) is widely used to restrict the simulation problem onto a bounded computational domain. We propose an adaptive PML method which exhibits a good convergence even for critical problems where standard PML implementations fail. Besides the computation of the near field, that is the electromagnetic field within the computational domain, it is of major interest to evaluate the electromagnetic field in the exterior domain and to compute the far field. So far, this was numerically only possible for simple geometries such as homogeneous exterior domains or layered media. To deal with more complicated devices, for example with waveguide inhomogeneities, we develop an evaluation formula based on the PML solution which allows for an exterior domain field evaluation in a half space above the device. Finally, we generalize the PML method to problems with multiply structured exterior domains. The term "multiply structured exterior domain" is defined in this thesis and means that the exterior domain exhibits several half-infinite structures. Mathematically, this gives rise to various complications. For example, no analytical solutions to Maxwell's equations for standard light sources are available in the exterior domain, which are needed to describe the incoming field in a light scattering problem. To tackle this we propose a new light scattering problem formulation which fits well into the PML method framework and which may be regarded as an extension of classical contributions by Sommerfeld, Wiener and Hopf. An exterior domain evaluation formula for multiply structured exterior domains with an extended illumination is derived as well.}, language = {en} } @incollection{SchmidtFrieseZschiedrichetal.2003, author = {Schmidt, Frank and Friese, T. and Zschiedrich, Lin and Deuflhard, Peter}, title = {Adaptive Multigrid Methods for the Vectorial Maxwell Eigenvalue Problem for Optical Waveguide Design}, series = {Mathematics - Key Technology for the Future}, booktitle = {Mathematics - Key Technology for the Future}, publisher = {Springer}, pages = {270 -- 292}, year = {2003}, language = {en} } @article{SchmidtHohageKloseetal.2008, author = {Schmidt, Frank and Hohage, Thorsten and Klose, Roland and Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {Pole condition: A numerical method for Helmholtz-type scattering problems with inhomogeneous exterior domain}, series = {J. Comput. Appl. Math.}, volume = {218}, journal = {J. Comput. Appl. Math.}, number = {1}, doi = {10.1016/j.cam.2007.04.046}, pages = {61 -- 69}, year = {2008}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, series = {Photomask Technology}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, series = {Integrated Optics}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, series = {Phys. Status Solidi B}, volume = {244}, journal = {Phys. Status Solidi B}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, series = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, series = {phys. stat. sol. (a)}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @article{RuprechtSchaedleSchmidtetal.2008, author = {Ruprecht, Daniel and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Transparent boundary conditions for time-dependent problems}, series = {SIAM J. Sci. Comput.}, volume = {30}, journal = {SIAM J. Sci. Comput.}, number = {5}, doi = {10.1137/070692637}, pages = {2358 -- 2385}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, series = {Photomask Technology}, volume = {6730}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, pages = {6630}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Evanschitzky, Peter and Erdmann, Andreas}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, series = {Photomask Technology}, volume = {7122}, booktitle = {Photomask Technology}, editor = {Kawahira, H. and Zurbrick, L. S.}, publisher = {Proc. SPIE}, doi = {10.1117/12.801248}, pages = {71221}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, series = {Photomask Technology 2011}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} }