@article{SchneiderManleyKruegeretal.2022, author = {Schneider, Philipp-Immanuel and Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and K{\"o}ning, Rainer and Bodermann, Bernd and Burger, Sven}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, volume = {12137}, journal = {Proc. SPIE}, doi = {10.1117/12.2620762}, pages = {121370I}, year = {2022}, language = {en} } @article{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators}, volume = {5}, journal = {Commun. Phys.}, arxiv = {http://arxiv.org/abs/2203.11101}, doi = {10.1038/s42005-022-00977-1}, pages = {202}, year = {2022}, language = {en} } @article{KruegerDopslaffManleyetal.2026, author = {Kr{\"u}ger, Jan and Dopslaff, Sven and Manley, Phillip and Bergmann, Detlef and K{\"o}ning, Rainer and Dai, Gaoliang and Hahm, Kai and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Bosse, Harald and Bodermann, Bernd}, title = {Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach}, volume = {37}, journal = {Meas. Sci. Technol.}, doi = {10.1088/1361-6501/ae44bb}, pages = {095004}, year = {2026}, language = {en} }