@misc{BetzHammerschmidtZschiedrichetal.2024, author = {Betz, Fridtjof and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven and Binkowski, Felix}, title = {Source code and simulation results: Efficient rational approximation of optical response functions with the AAA algorithm}, journal = {Zenodo}, doi = {10.5281/zenodo.10853692}, pages = {doi: 10.5281/zenodo.10853692}, year = {2024}, language = {en} } @article{PlockBinkowskiZschiedrichetal.2024, author = {Plock, Matthias and Binkowski, Felix and Zschiedrich, Lin and Schneider, Phillip-Immanuel and Burger, Sven}, title = {Fabrication uncertainty guided design optimization of a photonic crystal cavity by using Gaussian processes}, volume = {41}, journal = {J. Opt. Soc. Am. B}, arxiv = {http://arxiv.org/abs/2402.09420}, doi = {10.1364/JOSAB.505767}, pages = {850}, year = {2024}, language = {en} } @misc{PlockBinkowskiZschiedrichetal.2024, author = {Plock, Matthias and Binkowski, Felix and Zschiedrich, Lin and Schneider, Phillip-Immanuel and Burger, Sven}, title = {Research data for "Fabrication uncertainty guided design optimization of a photonic crystal cavity by using Gaussian processes"}, journal = {Zenodo}, doi = {10.5281/zenodo.8131611}, pages = {doi: 10.5281/zenodo.8131611}, year = {2024}, language = {en} } @article{KuenLoefflerTsarapkinetal.2024, author = {Kuen, Lilli and L{\"o}ffler, Lorenz and Tsarapkin, Aleksei and Zschiedrich, Lin and Feichtner, Thorsten and Burger, Sven and H{\"o}flich, Katja}, title = {Chiral and directional optical emission from a dipole source coupled to a helical plasmonic antenna}, volume = {124}, journal = {Appl. Phys. Lett.}, arxiv = {http://arxiv.org/abs/2402.00664}, doi = {10.1063/5.0201748}, pages = {231102}, year = {2024}, language = {en} } @article{BinkowskiKulligBetzetal.2024, author = {Binkowski, Felix and Kullig, Julius and Betz, Fridtjof and Zschiedrich, Lin and Walther, Andrea and Wiersig, Jan and Burger, Sven}, title = {Computing eigenfrequency sensitivities near exceptional points}, volume = {6}, journal = {Phys. Rev. Research}, arxiv = {http://arxiv.org/abs/2402.17648}, doi = {10.1103/PhysRevResearch.6.023148}, pages = {023148}, year = {2024}, language = {en} } @misc{BinkowskiKulligBetzetal.2024, author = {Binkowski, Felix and Kullig, Julius and Betz, Fridtjof and Zschiedrich, Lin and Walther, Andrea and Wiersig, Jan and Burger, Sven}, title = {Source code and simulation results: Computing eigenfrequency sensitivities near exceptional points}, journal = {Zenodo}, doi = {10.5281/zenodo.10715639}, pages = {doi: 10.5281/zenodo.10715639}, year = {2024}, language = {en} } @misc{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Source code and simulation data for Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators}, journal = {Zenodo}, doi = {10.5281/zenodo.6614951}, year = {2022}, language = {en} } @article{SchneiderManleyKruegeretal.2022, author = {Schneider, Philipp-Immanuel and Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and K{\"o}ning, Rainer and Bodermann, Bernd and Burger, Sven}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, volume = {12137}, journal = {Proc. SPIE}, doi = {10.1117/12.2620762}, pages = {121370I}, year = {2022}, language = {en} } @article{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators}, volume = {5}, journal = {Commun. Phys.}, arxiv = {http://arxiv.org/abs/2203.11101}, doi = {10.1038/s42005-022-00977-1}, pages = {202}, year = {2022}, language = {en} } @article{KruegerDopslaffManleyetal.2026, author = {Kr{\"u}ger, Jan and Dopslaff, Sven and Manley, Phillip and Bergmann, Detlef and K{\"o}ning, Rainer and Dai, Gaoliang and Hahm, Kai and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Bosse, Harald and Bodermann, Bernd}, title = {Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach}, volume = {37}, journal = {Meas. Sci. Technol.}, doi = {10.1088/1361-6501/ae44bb}, pages = {095004}, year = {2026}, language = {en} }