@phdthesis{Zschiedrich2009, author = {Zschiedrich, Lin}, title = {Transparent boundary conditions for Maxwell's equations: Numerical concepts beyond the PML method}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:188-fudissthesis000000013994-8}, year = {2009}, abstract = {Optical technologies are ubiquitously used in hi-tech devices. As a common feature of such devices one finds structures with dimensions in the order of the wavelength of the used light. To design and produce such devices, the wave nature of light must be taken into account. Accordingly, robust simulation tools are required which are based on rigorously solving Maxwell's equations, the governing equations of light propagation within macroscopic media. This thesis contributes to the modeling and the numerical computation of light scattering problems: Light scattering problems are typically posed on the entire space. The Perfectly-Matched -Layer method (PML) is widely used to restrict the simulation problem onto a bounded computational domain. We propose an adaptive PML method which exhibits a good convergence even for critical problems where standard PML implementations fail. Besides the computation of the near field, that is the electromagnetic field within the computational domain, it is of major interest to evaluate the electromagnetic field in the exterior domain and to compute the far field. So far, this was numerically only possible for simple geometries such as homogeneous exterior domains or layered media. To deal with more complicated devices, for example with waveguide inhomogeneities, we develop an evaluation formula based on the PML solution which allows for an exterior domain field evaluation in a half space above the device. Finally, we generalize the PML method to problems with multiply structured exterior domains. The term "multiply structured exterior domain" is defined in this thesis and means that the exterior domain exhibits several half-infinite structures. Mathematically, this gives rise to various complications. For example, no analytical solutions to Maxwell's equations for standard light sources are available in the exterior domain, which are needed to describe the incoming field in a light scattering problem. To tackle this we propose a new light scattering problem formulation which fits well into the PML method framework and which may be regarded as an extension of classical contributions by Sommerfeld, Wiener and Hopf. An exterior domain evaluation formula for multiply structured exterior domains with an extended illumination is derived as well.}, language = {en} } @misc{SchaedleZschiedrich2005, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {Additive Schwarz method for scattering problems using the PML method at interfaces}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8613}, number = {05-27}, year = {2005}, abstract = {Scattering problems in integrated optics can be modeled in simple cases by the Helmholtz equation. The computational domain is truncated by a non-reflecting boundary condition. We investigate Schwarz algorithms with a sort of DtN operator, realized by the PML-method, at the interfaces of the sub-domains as an iterative solver.}, language = {en} } @misc{SchaedleZschiedrichBurgeretal.2006, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations: Scattering off Periodic Structures}, doi = {/10.1016/j.jcp.2007.04.017}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-8984}, number = {06-04}, year = {2006}, abstract = {We present a domain decomposition approach for the computation of the electromagnetic field within periodic structures. We use a Schwarz method with transparent boundary conditions at the interfaces of the domains. Transparent boundary conditions are approximated by the perfectly matched layer method (PML). To cope with Wood anomalies appearing in periodic structures an adaptive strategy to determine optimal PML parameters is developed. We focus on the application to typical EUV lithography line masks. Light propagation within the multi-layer stack of the EUV mask is treated analytically. This results in a drastic reduction of the computational costs and allows for the simulation of next generation lithography masks on a standard personal computer.}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite-element based electromagnetic field simulations: Benchmark results for isolated structures}, volume = {8880}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1310.2732}, doi = {10.1117/12.2026213}, pages = {88801Z}, year = {2013}, language = {en} } @inproceedings{PomplunBurgerRozovaetal.2011, author = {Pomplun, Jan and Burger, Sven and Rozova, Maria and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of optical modes in VCSELs}, booktitle = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, doi = {10.1109/NUSOD.2011.6041170}, pages = {119 -- 120}, year = {2011}, language = {en} } @inproceedings{ZschiedrichSchmidtPomplunetal.2016, author = {Zschiedrich, Lin and Schmidt, Frank and Pomplun, Jan and Burger, Sven}, title = {Finite elements for nano-optics applications}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {178}, year = {2016}, language = {en} } @article{SchneiderHammerschmidtZschiedrichetal.2019, author = {Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven}, title = {Using Gaussian process regression for efficient parameter reconstruction}, volume = {10959}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1903.12128}, doi = {10.1117/12.2513268}, pages = {1095911}, year = {2019}, language = {en} } @article{BinkowskiZschiedrichBurger2019, author = {Binkowski, Felix and Zschiedrich, Lin and Burger, Sven}, title = {An auxiliary field approach for computing optical resonances in dispersive media}, volume = {15}, journal = {J. Eur. Opt. Soc.-Rapid}, doi = {10.1186/s41476-019-0098-z}, pages = {3}, year = {2019}, language = {en} } @article{KewesBinkowskiBurgeretal.2018, author = {Kewes, G{\"u}nter and Binkowski, Felix and Burger, Sven and Zschiedrich, Lin and Benson, Oliver}, title = {Heuristic Modeling of Strong Coupling in Plasmonic Resonators}, volume = {5}, journal = {ACS Photonics}, arxiv = {http://arxiv.org/abs/1904.04584}, doi = {10.1021/acsphotonics.8b00766}, pages = {4089}, year = {2018}, language = {en} } @article{BinkowskiZschiedrichBurger2020, author = {Binkowski, Felix and Zschiedrich, Lin and Burger, Sven}, title = {A Riesz-projection-based method for nonlinear eigenvalue problems}, volume = {419}, journal = {J. Comput. Phys.}, arxiv = {http://arxiv.org/abs/1811.11624}, doi = {10.1016/j.jcp.2020.109678}, pages = {109678}, year = {2020}, language = {en} } @article{LalanneYanGrasetal.2019, author = {Lalanne, P. and Yan, W. and Gras, A. and Sauvan, C. and Hugonin, J.-P. and Besbes, M. and Dem{\´e}sy, G. and Truong, M. D. and Gralak, B. and Zolla, F. and Nicolet, A. and Binkowski, Felix and Zschiedrich, Lin and Burger, Sven and Zimmerling, J. and Remis, R. and Urbach, H. Paul and Liu, H. T. and Weiss, T.}, title = {Quasinormal mode solvers for resonators with dispersive materials}, volume = {36}, journal = {J. Opt. Soc. Am. A}, arxiv = {http://arxiv.org/abs/1811.11751}, doi = {10.1364/JOSAA.36.000686}, pages = {686}, year = {2019}, language = {en} } @article{LedentsovJrShchukinKroppetal.2017, author = {Ledentsov, Jr., Nikolay and Shchukin, Vitaly and Kropp, J{\"o}rg-R. and Zschiedrich, Lin and Schmidt, Frank and Ledentsov, Jr., Nikolay}, title = {Resonant cavity light-emitting diodes based on dielectric passive cavity structures}, volume = {10124}, journal = {Proc. SPIE}, doi = {10.1117/12.2253089}, pages = {101240O}, year = {2017}, language = {en} } @article{HiremathZschiedrichSchmidt2012, author = {Hiremath, Kirankumar and Zschiedrich, Lin and Schmidt, Frank}, title = {Numerical solution of nonlocal hydrodynamic Drude model for arbitrary shaped nano-plasmonic structures using Nedelec finite elements}, volume = {231}, journal = {J. Comp. Phys.}, number = {17}, doi = {10.1016/j.jcp.2012.05.013}, pages = {5890 -- 5896}, year = {2012}, language = {en} } @inproceedings{HohageSchmidtZschiedrich2002, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {A new method for the solution of scattering problems}, booktitle = {Proceedings of the JEE'02 Symposium}, editor = {Michielsen, Bas and Decav{\`e}le, Francine}, publisher = {ONERA}, address = {Toulouse}, pages = {251 -- 256}, year = {2002}, language = {en} } @article{HohageSchmidtZschiedrich2003, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {Solving Time-Harmonic Scattering Problems Based on the Pole Condition I: Theory}, volume = {35}, journal = {SIAM J. Math. Anal.}, number = {1}, doi = {10.1137/S0036141002406473}, pages = {183 -- 210}, year = {2003}, language = {en} } @article{HohageSchmidtZschiedrich2003, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {Solving Time-Harmonic Scattering Problems Based on the Pole Condition II: Convergence of the PML Method}, volume = {35}, journal = {SIAM J. Math. Anal.}, number = {3}, doi = {10.1137/S0036141002406485}, pages = {547 -- 560}, year = {2003}, language = {en} } @article{EnkrichWegenerLindenetal.2005, author = {Enkrich, Christian and Wegener, M. and Linden, S. and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Zhou, C. and Koschny, T. and Soukoulis, C.}, title = {Magnetic metamaterials at telecommunication and visible frequencies}, volume = {95}, journal = {Phys. Rev. Lett.}, arxiv = {http://arxiv.org/abs/cond-mat/0504774}, doi = {10.1103/PhysRevLett.95.203901}, pages = {203901}, year = {2005}, language = {en} } @article{LockauZschiedrichBurger2009, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven}, title = {Accurate simulation of light transmission through subwavelength apertures in metal films}, volume = {11}, journal = {J. Opt. A}, arxiv = {http://arxiv.org/abs/0902.2862}, doi = {10.1088/1464-4258/11/11/114013}, pages = {114013}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichSchmidtetal.2009, author = {Lockau, D. and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven and Rech, Bernd}, title = {Efficient simulation of plasmonic structures for solar cells}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {48}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichBurgeretal.2011, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Ruske, F. and Rech, Bernd}, title = {Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.874967}, pages = {79330M}, year = {2011}, language = {en} } @article{MichaelisWaechterBurgeretal.2006, author = {Michaelis, D. and W{\"a}chter, Christoph and Burger, Sven and Zschiedrich, Lin and Br{\"a}uer, Andreas}, title = {Micro-optically assisted high index waveguide coupling}, volume = {45}, journal = {Appl. Opt.}, doi = {10.1364/AO.45.001831}, pages = {1831 -- 1838}, year = {2006}, language = {en} } @inproceedings{KloseBurgerSchmidtetal.2005, author = {Klose, Roland and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A multilevel method for the computation of eigenmodes in 3D photonic crystals}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2005.1518135}, pages = {61 -- 62}, year = {2005}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{SchaedleZschiedrich2007, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {Additive Schwarz method for scattering problems using the PML method at interfaces}, volume = {55}, booktitle = {Domain Decomposition Methods in Science and Engineering XVI}, editor = {Widlund, Olof and Keyes, David}, publisher = {Springer}, pages = {205 -- 212}, year = {2007}, language = {en} } @article{SchaedleZschiedrichBurgeretal.2007, author = {Sch{\"a}dle, Achim and Zschiedrich, Lin and Burger, Sven and Klose, Roland and Schmidt, Frank}, title = {Domain Decomposition Method for Maxwell's Equations}, volume = {226}, journal = {J. Comput. Phys.}, doi = {10.1016/j.jcp.2007.04.017}, pages = {477 -- 493}, year = {2007}, language = {en} } @inproceedings{SchmidtPomplunZschiedrichetal.2011, author = {Schmidt, Frank and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven}, title = {Fast online simulation of 3D nanophotonic structures by the reduced basis method}, volume = {7941}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XV}, publisher = {Proc. SPIE}, doi = {10.1117/12.874726}, pages = {79410G}, year = {2011}, language = {en} } @incollection{SchmidtFrieseZschiedrichetal.2003, author = {Schmidt, Frank and Friese, T. and Zschiedrich, Lin and Deuflhard, Peter}, title = {Adaptive Multigrid Methods for the Vectorial Maxwell Eigenvalue Problem for Optical Waveguide Design}, booktitle = {Mathematics - Key Technology for the Future}, publisher = {Springer}, pages = {270 -- 292}, year = {2003}, language = {en} } @article{SchmidtHohageKloseetal.2008, author = {Schmidt, Frank and Hohage, Thorsten and Klose, Roland and Sch{\"a}dle, Achim and Zschiedrich, Lin}, title = {Pole condition: A numerical method for Helmholtz-type scattering problems with inhomogeneous exterior domain}, volume = {218}, journal = {J. Comput. Appl. Math.}, number = {1}, doi = {10.1016/j.cam.2007.04.046}, pages = {61 -- 69}, year = {2008}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, volume = {8255}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1111.4393}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @article{RuprechtSchaedleSchmidtetal.2008, author = {Ruprecht, Daniel and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Transparent boundary conditions for time-dependent problems}, volume = {30}, journal = {SIAM J. Sci. Comput.}, number = {5}, doi = {10.1137/070692637}, pages = {2358 -- 2385}, year = {2008}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, volume = {244}, journal = {Phys. Status Solidi B}, arxiv = {http://arxiv.org/abs/0711.2149}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{ZschiedrichBurgerKettneretal.2006, author = {Zschiedrich, Lin and Burger, Sven and Kettner, Benjamin and Schmidt, Frank}, title = {Advanced Finite Element Method for Nano-Resonators}, volume = {6115}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/physics/0601025}, doi = {10.1117/12.646252}, pages = {611515}, year = {2006}, language = {en} } @inproceedings{ZschiedrichBurgerKloseetal.2005, author = {Zschiedrich, Lin and Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {JCMmode: an adaptive finite element solver for the computation of leaky modes}, volume = {5728}, booktitle = {Integrated Optics: Devices, Materials, and Technologies IX}, editor = {Sidorin, Y. and W{\"a}chter, Christoph}, publisher = {Proc. SPIE}, doi = {10.1117/12.590372}, pages = {192 -- 202}, year = {2005}, language = {en} } @inproceedings{ZschiedrichBurgerPomplunetal.2007, author = {Zschiedrich, Lin and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Goal oriented adaptive finite element method for precise simulation of optical components}, volume = {6475}, booktitle = {Proc. SPIE, Integrated Optics}, editor = {Sidorin, Y. and Waechter, Ch.}, pages = {64750H}, year = {2007}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2008, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A rigorous finite-element domain decomposition method for electromagnetic near field simulations}, volume = {6924}, booktitle = {Optical Microlithography XXI}, editor = {Levinson, Harry and Dusa, Mircea}, publisher = {SPIE}, doi = {10.1117/12.771989}, year = {2008}, language = {en} } @inproceedings{ZschiedrichBurgerSchaedleetal.2005, author = {Zschiedrich, Lin and Burger, Sven and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {Domain decomposition method for electromagnetic scattering problems: application to EUV lithography}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, doi = {10.1109/NUSOD.2005.1518132}, pages = {55 -- 56}, year = {2005}, language = {en} } @inproceedings{ZschiedrichGreinerPomplunetal.2012, author = {Zschiedrich, Lin and Greiner, Horst and Pomplun, Jan and Hammerschmidt, Martin and Burger, Sven and Schmidt, Frank}, title = {FEM simulations of light extraction from nanostructured organic light-emitting diodes}, booktitle = {Renewable Energy and the Environment Optics and Photonics Congress}, publisher = {Optical Society of America}, doi = {10.1364/SOLED.2012.LT2B.5}, pages = {LT2B.5}, year = {2012}, language = {en} } @article{ZschiedrichKloseSchaedleetal.2006, author = {Zschiedrich, Lin and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank}, title = {A new finite element realization of the Perfectly Matched Layer Method for Helmholtz scattering problems on polygonal domains in 2D}, volume = {188}, journal = {J. Comput. Appl. Math.}, doi = {10.1016/j.cam.2005.03.047}, pages = {12 -- 32}, year = {2006}, language = {en} } @inproceedings{ZschiedrichSchmidt2008, author = {Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of light propagation in non-periodic mask patterns}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{WongKangLeeetal.2011, author = {Wong, G. and Kang, M. and Lee, H. and Burger, Sven and Zschiedrich, Lin and Biancalana, F. and Russell, P.}, title = {Strongly Twisted Solid-Core PCF: A One-Dimensional Chiral Metamaterial}, booktitle = {Frontiers in Optics}, publisher = {Optical Society of America}, doi = {10.1364/FIO.2011.FMG3}, pages = {FMG3}, year = {2011}, language = {en} } @inproceedings{TyminskiPopescuBurgeretal.2012, author = {Tyminski, Jacek and Popescu, Raluca and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin and Matsuyama, Tomoyuki and Noda, Tomoya}, title = {Finite element models of lithographic mask topography}, volume = {8326}, booktitle = {Proc. SPIE}, editor = {Conley, W.}, doi = {10.1117/12.916957}, pages = {83261B}, year = {2012}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Blome, Mark and Schmidt, Frank}, title = {Advanced finite-element methods for design and analysis of nano-optical structures: Applications}, volume = {8642}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4356}, doi = {10.1117/12.2001094}, pages = {864205}, year = {2013}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Bodermann, Bernd}, title = {Fast simulation method for parameter reconstruction in optical metrology}, volume = {8681}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4367}, doi = {10.1117/12.2011154}, pages = {868119}, year = {2013}, language = {en} } @article{ZschiedrichGreinerBurgeretal.2013, author = {Zschiedrich, Lin and Greiner, Horst and Burger, Sven and Schmidt, Frank}, title = {Numerical analysis of nanostructures for enhanced light extraction from OLEDs}, volume = {8641}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4380}, doi = {10.1117/12.2001132}, pages = {86410B}, year = {2013}, language = {en} }