@inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} }