@inproceedings{ScholzeBodermannBurgeretal.2014, author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, year = {2014}, language = {en} } @inproceedings{SoltwischWerneckeHaaseetal.2014, author = {Soltwisch, Victor and Wernecke, Jan and Haase, Anton and Probst, J{\"u}rgen and Schoengen, Max and Scholze, Frank and Pomplun, Jan and Burger, Sven}, title = {Determination of line profile on nanostructured surfaces using EUV and x-ray scattering}, volume = {9235}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2066165}, pages = {92351D}, year = {2014}, language = {en} }