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MEMS MOEMS}, doi = {10.1117/1.JMM.19.1.014001}, pages = {014001}, language = {en} } @misc{PfluegerKlineFernandezHerreroetal., author = {Pfl{\"u}ger, Mika and Kline, R Joseph and Fern{\´a}ndez Herrero, Anal{\´i}a and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]}, doi = {10.24433/CO.0953516.v2}, language = {en} } @article{AndrleHoenickeGwaltetal., author = {Andrle, Anna and H{\"o}nicke, Philipp and Gwalt, Grzegorz and Schneider, Philipp-Immanuel and Kayser, Yves and Siewert, Frank and Soltwisch, Victor}, title = {Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning}, series = {Nanomaterials}, volume = {11}, journal = {Nanomaterials}, doi = {10.3390/nano11071647}, pages = {1647}, language = {en} }