@article{TyminskiPomplunZschiedrichetal.2013, author = {Tyminski, Jacek and Pomplun, Jan and Zschiedrich, Lin and Flagello, Donis and Matsuyama, Tomiyuki}, title = {Topographic mask modeling with reduced basis finite element method}, series = {Proc. SPIE}, volume = {8683}, journal = {Proc. SPIE}, doi = {10.1117/12.2011613}, pages = {86831C}, year = {2013}, language = {en} }