@inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} }