@article{MukherjeeBurgerSiefkeetal.2025, author = {Mukherjee, Deshabrato and Burger, Sven and Siefke, Thomas and Gour, Jeetendra and Bodermann, Bernd and Petrik, Peter}, title = {Spectroscopic Ellipsometry of Plasmonic Gratings─Ideal Parameters for Sensing and Subpicometer Measurement Uncertainty}, volume = {10}, journal = {ACS Omega}, number = {14}, doi = {10.1021/acsomega.5c00951}, pages = {14466 -- 14473}, year = {2025}, language = {en} }