@article{AndrleHoenickeSchneideretal., author = {Andrle, Anna and H{\"o}nicke, Philipp and Schneider, Philipp-Immanuel and Kayser, Yves and Hammerschmidt, Martin and Burger, Sven and Scholze, Frank and Beckhoff, Burkhard and Soltwisch, Victor}, title = {Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction}, series = {Proc. SPIE}, volume = {11057}, journal = {Proc. SPIE}, doi = {10.1117/12.2526082}, pages = {110570M}, language = {en} }