@inproceedings{BurgerKloseMaerzetal.2004, author = {Burger, Sven and Klose, Roland and M{\"a}rz, Reinhard and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Efficient Finite Element Methods for the Design of Microoptical Components}, booktitle = {Proc. Microoptics Conf. 2004}, year = {2004}, language = {en} }