@inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, series = {Photomask Technology}, volume = {6730}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, pages = {6630}, year = {2007}, language = {en} }