@article{PfluegerKlineFernandezHerreroetal.2020, author = {Pfl{\"u}ger, Mika and Kline, R. Joseph and Fern{\´a}ndez Herrero, Analia and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering}, volume = {19}, journal = {J. Micro Nanolithogr. MEMS MOEMS}, arxiv = {http://arxiv.org/abs/1910.08532}, doi = {10.1117/1.JMM.19.1.014001}, pages = {014001}, year = {2020}, language = {en} }