@inproceedings{KuenBetzBinkowskietal.2023, author = {Kuen, Lilli and Betz, Fridtjof and Binkowski, Felix and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Heermeier, Niels and Rodt, Sven and Reitzenstein, Stephan and Burger, Sven}, title = {Applying a Riesz-projection-based contour integral eigenvalue solver to compute resonance modes of a VCSEL}, volume = {12575}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/2306.02926}, doi = {10.1117/12.2665490}, pages = {125750J}, year = {2023}, language = {en} } @article{PlockHammerschmidtBurgeretal.2023, author = {Plock, Matthias and Hammerschmidt, Martin and Burger, Sven and Schneider, Philipp-Immanuel and Sch{\"u}tte, Christof}, title = {Impact Study of Numerical Discretization Accuracy on Parameter Reconstructions and Model Parameter Distributions}, volume = {60}, journal = {Metrologia}, arxiv = {http://arxiv.org/abs/2305.02663}, doi = {10.1088/1681-7575/ace4cd}, pages = {054001}, year = {2023}, abstract = {In optical nano metrology numerical models are used widely for parameter reconstructions. Using the Bayesian target vector optimization method we fit a finite element numerical model to a Grazing Incidence x-ray fluorescence data set in order to obtain the geometrical parameters of a nano structured line grating. Gaussian process, stochastic machine learning surrogate models, were trained during the reconstruction and afterwards sampled with a Markov chain Monte Carlo sampler to determine the distribution of the reconstructed model parameters. The numerical discretization parameters of the used finite element model impact the numerical discretization error of the forward model. We investigated the impact of the polynomial order of the finite element ansatz functions on the reconstructed parameters as well as on the model parameter distributions. We showed that such a convergence study allows to determine numerical parameters which allows for efficient and accurate reconstruction results.}, language = {en} } @inproceedings{SekulicSchneiderHammerschmidtetal.2025, author = {Sekulic, Ivan and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Schaible, Jonas and Burger, Sven}, title = {Physics informed Bayesian optimization for inverse design of diffractive optical elements}, volume = {PC13573}, booktitle = {Proc. SPIE}, doi = {10.1117/12.3064372}, pages = {PC135730R}, year = {2025}, language = {en} } @inproceedings{HammerschmidtPlockBurgeretal.2025, author = {Hammerschmidt, Martin and Plock, Matthias and Burger, Sven and Truong, Vinh and Soltwisch, Victor and Schneider, Philipp-Immanuel}, title = {Machine learning approach for full Bayesian parameter reconstruction}, volume = {13568}, booktitle = {Proc. SPIE}, doi = {10.1117/12.3062268}, pages = {1356806}, year = {2025}, language = {en} } @article{BinkowskiKoulasSimosBetzetal.2025, author = {Binkowski, Felix and Koulas-Simos, Aris and Betz, Fridtjof and Plock, Matthias and Sekulic, Ivan and Manley, Phillip and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Munkhbat, Battulga and Reitzenstein, Stephan and Burger, Sven}, title = {High Purcell enhancement in all-TMDC nanobeam resonator designs with active monolayers for nanolasers}, volume = {112}, journal = {Phys. Rev. B}, arxiv = {http://arxiv.org/abs/2508.05333}, doi = {10.1103/nxh9-dhvx}, pages = {235410}, year = {2025}, language = {en} } @misc{BinkowskiKoulasSimosBetzetal.2025, author = {Binkowski, Felix and Koulas-Simos, Aris and Betz, Fridtjof and Plock, Matthias and Sekulic, Ivan and Manley, Phillip and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Munkhbat, Battulga and Reitzenstein, Stephan and Burger, Sven}, title = {Source code and simulation results: High Purcell enhancement in all-TMDC nanobeam resonator designs with active monolayers for nanolasers}, journal = {Zenodo}, doi = {10.5281/zenodo.16533803}, year = {2025}, language = {en} } @inproceedings{SchneiderSekulicPlocketal.2025, author = {Schneider, Philipp-Immanuel and Sekulic, Ivan and Plock, Matthias and Hammerschmidt, Martin and Rodt, Sven and Reitzenstein, Stephan and Burger, Sven}, title = {Physics-informed Bayesian optimization of nanophotonic devices}, volume = {IPRSN}, booktitle = {Advanced Photonics Congress}, doi = {10.1364/IPRSN.2025.ITu1A.2}, pages = {ITu1A.2}, year = {2025}, language = {en} } @misc{JaegerSutterSchneideretal.2021, author = {J{\"a}ger, Klaus and Sutter, Johannes and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Becker, Christiane}, title = {Optical simulations of nanotextured perovskite/silicon tandem solar cell}, journal = {HZB Data Service}, doi = {10.5442/ND000005}, year = {2021}, language = {en} } @article{PlockBurgerSchneider2021, author = {Plock, Matthias and Burger, Sven and Schneider, Philipp-Immanuel}, title = {Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology}, volume = {11783}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/2107.05499}, doi = {10.1117/12.2592266}, pages = {117830J}, year = {2021}, language = {en} } @article{AndrleHoenickeGwaltetal.2021, author = {Andrle, Anna and H{\"o}nicke, Philipp and Gwalt, Grzegorz and Schneider, Philipp-Immanuel and Kayser, Yves and Siewert, Frank and Soltwisch, Victor}, title = {GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures}, volume = {11611}, journal = {Proc. SPIE}, doi = {10.1117/12.2586082}, pages = {116110R}, year = {2021}, language = {en} } @article{AndrleHoenickeGwaltetal.2021, author = {Andrle, Anna and H{\"o}nicke, Philipp and Gwalt, Grzegorz and Schneider, Philipp-Immanuel and Kayser, Yves and Siewert, Frank and Soltwisch, Victor}, title = {Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning}, volume = {11}, journal = {Nanomaterials}, doi = {10.3390/nano11071647}, pages = {1647}, year = {2021}, language = {en} } @inproceedings{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Numerical methods for the investigation of resonances in nanophotonics}, booktitle = {The 12th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2022)}, editor = {Zouhdi, S.}, issn = {2429-1390}, pages = {247}, year = {2022}, language = {en} } @inproceedings{BinkowskiBetzColometal.2021, author = {Binkowski, Felix and Betz, Fridtjof and Colom, Remi and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Contour integral methods for resonance phenomena in nano-optics}, booktitle = {The 11th International Conference on Metamaterials, Photonic Crystals and Plasmonics (META 2021)}, editor = {Zouhdi, S. and Pawlak, D. and Kudelski, A.}, issn = {2429-1390}, pages = {523}, year = {2021}, language = {en} } @article{JaegerSutterHammerschmidtetal.2021, author = {J{\"a}ger, Klaus and Sutter, Johannes and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Becker, Christiane}, title = {Prospects of light management in perovskite/silicon tandem solar cells}, volume = {10}, journal = {Nanophotonics}, doi = {10.1515/nanoph-2020-0674}, pages = {1991}, year = {2021}, language = {en} } @inproceedings{SchneiderZschiedrichHammerschmidtetal.2022, author = {Schneider, Philipp-Immanuel and Zschiedrich, Lin and Hammerschmidt, Martin and Kuen, Lilli and Sekulic, Ivan and Kluge, Julien and Leykauf, Bastian and Krutzik, Markus and Burger, Sven}, title = {Boosting quantum optics experiments with Bayesian optimization}, volume = {12227}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2632419}, pages = {122270F}, year = {2022}, language = {en} } @inproceedings{KruegerManleyZschiedrichetal.2022, author = {Kr{\"u}ger, Jan and Manley, Phillip and Zschiedrich, Lin and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and K{\"o}ning, Rainer and Bodermann, Bernd}, title = {Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie}, booktitle = {Proc. DGaO}, url = {http://nbn-resolving.de/urn:nbn:de:0287-2022-P005-6}, pages = {P5}, year = {2022}, language = {en} } @inproceedings{ManleyKruegerZschiedrichetal.2022, author = {Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and Hammerschmidt, Martin and Bodermann, Bernd and K{\"o}ning, Rainer and Schneider, Philipp-Immanuel}, title = {Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy}, volume = {266}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202226610010}, pages = {10010}, year = {2022}, language = {en} } @misc{MusialSekSchneideretal.2024, author = {Musial, Anna and Sek, Grzegorz and Schneider, Philipp-Immanuel and Reitzenstein, Stephan}, title = {Fiber-coupled solid-state-based single-photon sources}, journal = {Specialty Optical Fibers}, publisher = {Woodhead Publishing}, doi = {10.1016/B978-0-443-18495-6.00004-4}, pages = {345 -- 384}, year = {2024}, language = {de} } @misc{PlockAndrleBurgeretal.2022, author = {Plock, Matthias and Andrle, Kas and Burger, Sven and Schneider, Philipp-Immanuel}, title = {Research data and example scripts for the paper "Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction"}, journal = {Zenodo}, doi = {10.5281/zenodo.6359594}, year = {2022}, language = {en} } @misc{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Source code and simulation data for Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators}, journal = {Zenodo}, doi = {10.5281/zenodo.6614951}, year = {2022}, language = {en} } @article{SchneiderManleyKruegeretal.2022, author = {Schneider, Philipp-Immanuel and Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and K{\"o}ning, Rainer and Bodermann, Bernd and Burger, Sven}, title = {Reconstructing phase aberrations for high-precision dimensional microscopy}, volume = {12137}, journal = {Proc. SPIE}, doi = {10.1117/12.2620762}, pages = {121370I}, year = {2022}, language = {en} } @inproceedings{JaegerSutterTockhornetal.2022, author = {J{\"a}ger, Klaus and Sutter, Johannes and Tockhorn, Philipp and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Albrecht, Steve and Becker, Christiane}, title = {Improving perovskite/silicon tandem solar cells with optical simulations}, volume = {PC12150}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2621255}, pages = {PC1215001}, year = {2022}, language = {en} } @article{PlockAndrleBurgeretal.2022, author = {Plock, Matthias and Andrle, Kas and Burger, Sven and Schneider, Philipp-Immanuel}, title = {Bayesian Target-Vector Optimization for Efficient Parameter Reconstruction}, volume = {5}, journal = {Adv. Theory Simul.}, arxiv = {http://arxiv.org/abs/2202.11559}, doi = {10.1002/adts.202200112}, pages = {2200112}, year = {2022}, language = {en} } @article{BinkowskiBetzHammerschmidtetal.2022, author = {Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Zschiedrich, Lin and Burger, Sven}, title = {Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators}, volume = {5}, journal = {Commun. Phys.}, arxiv = {http://arxiv.org/abs/2203.11101}, doi = {10.1038/s42005-022-00977-1}, pages = {202}, year = {2022}, language = {en} } @article{KruegerDopslaffManleyetal.2026, author = {Kr{\"u}ger, Jan and Dopslaff, Sven and Manley, Phillip and Bergmann, Detlef and K{\"o}ning, Rainer and Dai, Gaoliang and Hahm, Kai and Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Bosse, Harald and Bodermann, Bernd}, title = {Photomask linewidth measurement comparison including an improved model-based through-focus measurement approach}, volume = {37}, journal = {Meas. Sci. Technol.}, doi = {10.1088/1361-6501/ae44bb}, pages = {095004}, year = {2026}, language = {en} }