@inproceedings{MukherjeeBurgerSiefkeetal.2024, author = {Mukherjee, Deshabrato and Burger, Sven and Siefke, Thomas and Gour, Jeetendra and Bodermann, Bernd and Petrik, Peter}, title = {Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method}, volume = {309}, booktitle = {EPJ Web of Conferences}, doi = {10.1051/epjconf/202430902016}, pages = {02016}, year = {2024}, language = {en} }