@inproceedings{TyminskiPopescuBurgeretal.2012, author = {Tyminski, Jacek and Popescu, Raluca and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin and Matsuyama, Tomoyuki and Noda, Tomoya}, title = {Finite element models of lithographic mask topography}, volume = {8326}, booktitle = {Proc. SPIE}, editor = {Conley, W.}, doi = {10.1117/12.916957}, pages = {83261B}, year = {2012}, language = {en} }