@article{PetrikKumarFriedetal.2015, author = {Petrik, Peter and Kumar, Nitish and Fried, Miklos and Fodor, B{\´a}lint and Juh{\´a}sz, Gy{\"o}rgy and Pereira, Silvania and Burger, Sven and Urbach, H. Paul}, title = {Fourier ellipsometry - an ellipsometric approach to Fourier scatterometry}, volume = {10}, journal = {J. Eur. Opt. Soc.-Rapid}, doi = {10.2971/jeos.2015.15002}, pages = {15002}, year = {2015}, language = {en} }