@article{BodermannBuhrDanzebrinketal.2011, author = {Bodermann, Bernd and Buhr, Egbert and Danzebrink, Hans-Ulrich and B{\"a}r, Markus and Scholze, Frank and Krumrey, Michael and Wurm, Matthias and Klapetek, Petr and Hansen, Poul-Erik and Korpelainen, Virpi and van Veghel, Marijn and Yacoot, Andrew and Siitonen, Samuli and El Gawhary, Omar and Burger, Sven and Saastamoinen, Toni}, title = {Joint Research on Scatterometry and AFM Wafer Metrology}, series = {AIP Conference Proceedings}, volume = {1395}, journal = {AIP Conference Proceedings}, number = {1}, publisher = {AIP}, doi = {10.1063/1.3657910}, pages = {319 -- 323}, year = {2011}, language = {en} } @inproceedings{ScholzeBodermannBurgeretal., author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, series = {Proc. SPIE}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, language = {en} } @article{SoltwischHaaseWerneckeetal., author = {Soltwisch, Victor and Haase, Anton and Wernecke, Jan and Probst, J{\"u}rgen and Schoengen, Max and Burger, Sven and Krumrey, Michael and Scholze, Frank}, title = {Correlated diffuse x-ray scattering from periodically nanostructured surfaces}, series = {Phys. Rev. B}, volume = {94}, journal = {Phys. Rev. B}, doi = {10.1103/PhysRevB.94.035419}, pages = {035419}, language = {en} } @inproceedings{AgcosBodermannBurgeretal., author = {Agcos, Emil and Bodermann, Bernd and Burger, Sven and Dai, Gaoliang and Endres, Johannes and Hansen, Poul-Erik and Nielson, Lars and Madsen, Morten and Heidenreich, Sebastian and Krumrey, Michael and Loechel, Bernd and Probst, J{\"u}rgen and Scholze, Frank and Soltwisch, Victor and Wurm, Matthias}, title = {Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing}, series = {Proc. SPIE}, volume = {9556}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2190409}, pages = {955610}, language = {en} } @article{BennerBurgerGoeddekeetal., author = {Benner, Peter and Burger, Michael and G{\"o}ddeke, Dominik and G{\"o}rgen, Christiane and Himpe, Christian and Heiland, Jan and Koprucki, Thomas and Ohlberger, Mario and Rave, Stephan and Reidelbach, Marco and Saak, Jens and Sch{\"o}bel, Anita and Tabelow, Karsten and Weber, Marcus}, title = {Die mathematische Forschungsdateninitiative in der NFDI: MaRDI (Mathematical Research Data Initiative)}, series = {GAMM Rundbrief}, journal = {GAMM Rundbrief}, number = {1}, pages = {40 -- 43}, language = {de} }