@article{PlockBurgerSchneider2021, author = {Plock, Matthias and Burger, Sven and Schneider, Philipp-Immanuel}, title = {Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology}, volume = {11783}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/2107.05499}, doi = {10.1117/12.2592266}, pages = {117830J}, year = {2021}, language = {en} }