@article{PlockBurgerSchneider, author = {Plock, Matthias and Burger, Sven and Schneider, Philipp-Immanuel}, title = {Recent advances in Bayesian optimization with applications to parameter reconstruction in optical nano-metrology}, series = {Proc. SPIE}, volume = {11783}, journal = {Proc. SPIE}, doi = {10.1117/12.2592266}, pages = {117830J}, language = {en} }