@article{HammerschmidtWeiserSantiagoetal.2017, author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, volume = {10330}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1707.08467}, doi = {10.1117/12.2270596}, pages = {1033004}, year = {2017}, language = {en} }