@article{HammerschmidtWeiserSantiagoetal., author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, series = {Proc. SPIE}, volume = {10330}, journal = {Proc. SPIE}, doi = {10.1117/12.2270596}, pages = {1033004}, language = {en} }