@article{PakhomovLoechnerZschiedrichetal., author = {Pakhomov, Anton and L{\"o}chner, Franz and Zschiedrich, Lin and Saravi, Sina and Hammerschmidt, Martin and Burger, Sven and Pertsch, Thomas and Setzpfand, Frank}, title = {Far-field polarization signatures of surface optical nonlinearity in noncentrosymmetric semiconductors}, series = {Sci. Rep.}, volume = {10}, journal = {Sci. Rep.}, doi = {10.1038/s41598-020-67186-0}, pages = {10545}, language = {en} } @article{BinkowskiBetzColometal., author = {Binkowski, Felix and Betz, Fridtjof and Colom, R{\´e}mi and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven}, title = {Quasinormal mode expansion of optical far-field quantities}, series = {Phys. Rev. B}, volume = {102}, journal = {Phys. Rev. B}, doi = {10.1103/PhysRevB.102.035432}, pages = {035432}, language = {en} } @article{FarchminHammerschmidtSchneideretal., author = {Farchmin, Nando and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Wurm, Matthias and Bodermann, Bernd and B{\"a}r, Markus and Heidenreich, Sebastian}, title = {Efficient Bayesian inversion for shape reconstruction of lithography masks}, series = {J. Micro/Nanolith. MEMS MOEMS}, volume = {19}, journal = {J. Micro/Nanolith. MEMS MOEMS}, doi = {10.1117/1.JMM.19.2.024001}, pages = {024001}, language = {en} } @article{HammerschmidtDoepkingBurgeretal., author = {Hammerschmidt, Martin and D{\"o}pking, Sandra and Burger, Sven and Matera, Sebastian}, title = {Field Heterogeneities and Their Impact on Photocatalysis: Combining Optical and Kinetic Monte Carlo Simulations on the Nanoscale}, series = {J. Phys. Chem. C}, volume = {124}, journal = {J. Phys. Chem. C}, doi = {10.1021/acs.jpcc.9b11469}, pages = {3177}, language = {en} } @article{ManleyWaldeHagedornetal., author = {Manley, Phillip and Walde, Sebastian and Hagedorn, Sylvia and Hammerschmidt, Martin and Burger, Sven and Becker, Christiane}, title = {Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit?}, series = {Opt. Express}, volume = {28}, journal = {Opt. Express}, doi = {10.1364/OE.379438}, pages = {3619}, language = {en} } @inproceedings{BinkowskiBetzColometal., author = {Binkowski, Felix and Betz, Fridtjof and Colom, R{\´e}mi and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven}, title = {Modal expansion of optical far-field quantities using quasinormal modes}, series = {EPJ Web Conf.}, volume = {238}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202023805007}, pages = {05007}, language = {en} } @inproceedings{ColomBinkowskiBetzetal., author = {Colom, R{\´e}mi and Binkowski, Felix and Betz, Fridtjof and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven}, title = {Quasi-normal mode expansion as a tool for the design of nanophotonic devices}, series = {EPJ Web Conf.}, volume = {238}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202023805008}, pages = {05008}, language = {en} } @article{PfluegerKlineFernandezHerreroetal., author = {Pfl{\"u}ger, Mika and Kline, R. Joseph and Fern{\´a}ndez Herrero, Analia and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering}, series = {J. Micro Nanolithogr. MEMS MOEMS}, volume = {19}, journal = {J. Micro Nanolithogr. MEMS MOEMS}, doi = {10.1117/1.JMM.19.1.014001}, pages = {014001}, language = {en} } @misc{PfluegerKlineFernandezHerreroetal., author = {Pfl{\"u}ger, Mika and Kline, R Joseph and Fern{\´a}ndez Herrero, Anal{\´i}a and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering [Source Code]}, doi = {10.24433/CO.0953516.v2}, language = {en} }