@article{HammerschmidtSchneiderSantiagoetal.2018, author = {Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Santiago, Xavier Garcia and Zschiedrich, Lin and Weiser, Martin and Burger, Sven}, title = {Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization}, volume = {10694}, journal = {Proc. SPIE}, doi = {10.1117/12.2315468}, pages = {1069407}, year = {2018}, language = {en} } @misc{HammerschmidtWeiserSantiagoetal.2017, author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, issn = {1438-0064}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-64704}, year = {2017}, abstract = {We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.}, language = {en} } @article{HammerschmidtWeiserSantiagoetal.2017, author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, volume = {10330}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1707.08467}, doi = {10.1117/12.2270596}, pages = {1033004}, year = {2017}, language = {en} } @inproceedings{BarthRoderBrodoceanuetal.2016, author = {Barth, Carlo and Roder, Sebastian and Brodoceanu, Daniel and Kraus, Tobias and Burger, Sven and Hammerschmidt, Martin and Schmidt, Frank and Becker, Christiane}, title = {Increased fluorescence of PbS quantum dots on photonic crystal slab structures}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {181}, year = {2016}, language = {en} } @inproceedings{HammerschmidtBarthBurgeretal.2016, author = {Hammerschmidt, Martin and Barth, Carlo and Burger, Sven and Becker, Christiane and Schmidt, Frank}, title = {Determining 2D photonic crystal geometries from reflectance spectra with a reduced basis method}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {281}, year = {2016}, language = {en} } @article{SchneiderHammerschmidtZschiedrichetal.2019, author = {Schneider, Philipp-Immanuel and Hammerschmidt, Martin and Zschiedrich, Lin and Burger, Sven}, title = {Using Gaussian process regression for efficient parameter reconstruction}, volume = {10959}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1903.12128}, doi = {10.1117/12.2513268}, pages = {1095911}, year = {2019}, language = {en} } @article{SchneiderSantiagoSoltwischetal.2019, author = {Schneider, Philipp-Immanuel and Santiago, Xavier Garcia and Soltwisch, Victor and Hammerschmidt, Martin and Burger, Sven and Rockstuhl, Carsten}, title = {Benchmarking five global optimization approaches for nano-optical shape optimization and parameter reconstruction}, volume = {6}, journal = {ACS Photonics}, arxiv = {http://arxiv.org/abs/1809.06674}, doi = {10.1021/acsphotonics.9b00706}, pages = {2726}, year = {2019}, language = {en} } @inproceedings{JaegerManleyEisenhaueretal.2018, author = {J{\"a}ger, Klaus and Manley, Phillip and Eisenhauer, David and Tockhorn, Philipp and Sutter, Johannes and Hammerschmidt, Martin and Burger, Sven and Albrecht, Steve and Becker, Christiane}, title = {Light management with sinusoidal nanotextures}, booktitle = {Light, Energy and the Environment 2018}, doi = {10.1364/OSE.2018.OT5C.5}, pages = {OT5C.5}, year = {2018}, language = {en} } @article{PfluegerKlineFernandezHerreroetal.2020, author = {Pfl{\"u}ger, Mika and Kline, R. Joseph and Fern{\´a}ndez Herrero, Analia and Hammerschmidt, Martin and Soltwisch, Victor and Krumrey, Michael}, title = {Extracting dimensional parameters of gratings produced with self-aligned multiple patterning using grazing-incidence small-angle x-ray scattering}, volume = {19}, journal = {J. Micro Nanolithogr. MEMS MOEMS}, arxiv = {http://arxiv.org/abs/1910.08532}, doi = {10.1117/1.JMM.19.1.014001}, pages = {014001}, year = {2020}, language = {en} } @inproceedings{JaegerHammerschmidtKoeppeletal.2016, author = {J{\"a}ger, Klaus and Hammerschmidt, Martin and K{\"o}ppel, Grit and Burger, Sven and Becker, Christiane}, title = {On Accurate Simulations of Thin-Film Solar Cells With a Thick Glass Superstrate}, booktitle = {Light, Energy and the Environment 2016}, doi = {10.1364/PV.2016.PM3B.5}, pages = {PM3B.5}, year = {2016}, language = {en} }