@inproceedings{ZschiedrichSchmidtPomplunetal., author = {Zschiedrich, Lin and Schmidt, Frank and Pomplun, Jan and Burger, Sven}, title = {Finite elements for nano-optics applications}, series = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {178}, language = {en} } @inproceedings{ZschiedrichGreinerPomplunetal.2012, author = {Zschiedrich, Lin and Greiner, Horst and Pomplun, Jan and Hammerschmidt, Martin and Burger, Sven and Schmidt, Frank}, title = {FEM simulations of light extraction from nanostructured organic light-emitting diodes}, series = {Renewable Energy and the Environment Optics and Photonics Congress}, booktitle = {Renewable Energy and the Environment Optics and Photonics Congress}, publisher = {Optical Society of America}, doi = {10.1364/SOLED.2012.LT2B.5}, pages = {LT2B.5}, year = {2012}, language = {en} } @inproceedings{ZschiedrichBurgerPomplunetal.2007, author = {Zschiedrich, Lin and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Goal oriented adaptive finite element method for precise simulation of optical components}, series = {Proc. SPIE, Integrated Optics}, volume = {6475}, booktitle = {Proc. SPIE, Integrated Optics}, editor = {Sidorin, Y. and Waechter, Ch.}, pages = {64750H}, year = {2007}, language = {en} } @inproceedings{WenzelCrumpEkhteraeietal., author = {Wenzel, Hans and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Erbert, G{\"o}tz}, title = {Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers}, series = {Numerical Simulation of Optoelectronic Devices}, booktitle = {Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2011.6041183}, pages = {143 -- 144}, language = {en} } @inproceedings{TyminskiPopescuBurgeretal.2012, author = {Tyminski, Jacek and Popescu, Raluca and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin and Matsuyama, Tomoyuki and Noda, Tomoya}, title = {Finite element models of lithographic mask topography}, series = {Proc. SPIE}, volume = {8326}, booktitle = {Proc. SPIE}, editor = {Conley, W.}, doi = {10.1117/12.916957}, pages = {83261B}, year = {2012}, language = {en} } @article{TyminskiPomplunZschiedrichetal.2013, author = {Tyminski, Jacek and Pomplun, Jan and Zschiedrich, Lin and Flagello, Donis and Matsuyama, Tomiyuki}, title = {Topographic mask modeling with reduced basis finite element method}, series = {Proc. SPIE}, volume = {8683}, journal = {Proc. SPIE}, doi = {10.1117/12.2011613}, pages = {86831C}, year = {2013}, language = {en} } @inproceedings{SchmidtPomplunZschiedrichetal.2011, author = {Schmidt, Frank and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven}, title = {Fast online simulation of 3D nanophotonic structures by the reduced basis method}, series = {Integrated Optics: Devices, Materials, and Technologies XV}, volume = {7941}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XV}, publisher = {Proc. SPIE}, doi = {10.1117/12.874726}, pages = {79410G}, year = {2011}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, series = {Integrated Optics}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, series = {phys. stat. sol. (a)}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @incollection{PomplunZschiedrichKloseetal., author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers}, series = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, booktitle = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, publisher = {Wiley-VCH}, doi = {10.1002/9783527621880.ch17}, pages = {313 -- 331}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, series = {Photomask Technology}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, series = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, series = {Phys. Status Solidi B}, volume = {244}, journal = {Phys. Status Solidi B}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @article{PomplunBurgerZschiedrichetal., author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Gutsche, Philipp and Schmidt, Frank}, title = {Method for fast computation of angular light scattering spectra from 2D periodic arrays}, series = {Proc. SPIE}, volume = {9778}, journal = {Proc. SPIE}, doi = {10.1117/12.2219666}, pages = {977839}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerRozovaetal.2011, author = {Pomplun, Jan and Burger, Sven and Rozova, Maria and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of optical modes in VCSELs}, series = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, booktitle = {Numerical Simulation of Optoelectronic Devices (NUSOD), 11th International Conference on}, doi = {10.1109/NUSOD.2011.6041170}, pages = {119 -- 120}, year = {2011}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} } @misc{HammerschmidtHerrmannPomplunetal., author = {Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for Maxwell's equations with resonance phenomena}, series = {Proc. SPIE}, volume = {9630}, journal = {Proc. SPIE}, issn = {1438-0064}, doi = {10.1117/12.2190425}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-55687}, pages = {96300R}, abstract = {Rigorous optical simulations of 3-dimensional nano-photonic structures are an important tool in the analysis and optimization of scattering properties of nano-photonic devices or parameter reconstruction. To construct geometrically accurate models of complex structured nano-photonic devices the finite element method (FEM) is ideally suited due to its flexibility in the geometrical modeling and superior convergence properties. Reduced order models such as the reduced basis method (RBM) allow to construct self-adaptive, error-controlled, very low dimensional approximations for input-output relationships which can be evaluated orders of magnitude faster than the full model. This is advantageous in applications requiring the solution of Maxwell's equations for multiple parameters or a single parameter but in real time. We present a reduced basis method for 3D Maxwell's equations based on the finite element method which allows variations of geometric as well as material and frequency parameters. We demonstrate accuracy and efficiency of the method for a light scattering problem exhibiting a resonance in the electric field.}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, series = {Photomask Technology 2011}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Bodermann, Bernd}, title = {Fast simulation method for parameter reconstruction in optical metrology}, series = {Proc. SPIE}, volume = {8681}, journal = {Proc. SPIE}, doi = {10.1117/12.2011154}, pages = {868119}, year = {2013}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, series = {Integrated Optics: Devices, Materials, and Technologies XIV}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, series = {Integrated Photonics and Nanophotonics Research and Applications}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite-element based electromagnetic field simulations: Benchmark results for isolated structures}, series = {Proc. SPIE}, volume = {8880}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2026213}, pages = {88801Z}, year = {2013}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal., author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Herrmann, Sven and Schmidt, Frank}, title = {hp-finite element method for simulating light scattering from complex 3D structures}, series = {Proc. SPIE}, volume = {9424}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2085795}, pages = {94240Z}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Blome, Mark and Schmidt, Frank}, title = {Advanced finite-element methods for design and analysis of nano-optical structures: Applications}, series = {Proc. SPIE}, volume = {8642}, journal = {Proc. SPIE}, doi = {10.1117/12.2001094}, pages = {864205}, year = {2013}, language = {en} } @inproceedings{BurgerPomplunSchmidtetal.2011, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank and Zschiedrich, Lin}, title = {Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap}, series = {Physics and Simulation of Optoelectronic Devices XIX}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.875044}, pages = {79330T}, year = {2011}, language = {en} } @inproceedings{BurgerGutscheHammerschmidtetal., author = {Burger, Sven and Gutsche, Philipp and Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Schmidt, Frank and Wohlfeil, Benjamin and Zschiedrich, Lin}, title = {Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures}, series = {Proc. SPIE}, volume = {9630}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2190119}, pages = {96300S}, language = {en} }