@inproceedings{HammerschmidtZschiedrichSiaudinyteetal., author = {Hammerschmidt, Martin and Zschiedrich, Lin and Siaudinyt{\´e}, Lauryna and Manley, Phillip and Schneider, Philipp-Immanuel and Burger, Sven}, title = {Forward simulation of coherent beams on grating structures for coherent scatterometry}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673231}, pages = {PC1261907}, language = {en} }