@inproceedings{HammerschmidtZschiedrichSiaudinyteetal.2023, author = {Hammerschmidt, Martin and Zschiedrich, Lin and Siaudinyt{\´e}, Lauryna and Manley, Phillip and Schneider, Philipp-Immanuel and Burger, Sven}, title = {Forward simulation of coherent beams on grating structures for coherent scatterometry}, volume = {PC12619}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/2309.06109}, doi = {10.1117/12.2673231}, pages = {PC1261907}, year = {2023}, language = {en} }