@inproceedings{SoltwischWerneckeHaaseetal., author = {Soltwisch, Victor and Wernecke, Jan and Haase, Anton and Probst, J{\"u}rgen and Schoengen, Max and Scholze, Frank and Pomplun, Jan and Burger, Sven}, title = {Determination of line profile on nanostructured surfaces using EUV and x-ray scattering}, series = {Proc. SPIE}, volume = {9235}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2066165}, pages = {92351D}, language = {en} } @inproceedings{ScholzeBodermannBurgeretal., author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, series = {Proc. SPIE}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, language = {en} } @article{SoltwischHaaseWerneckeetal., author = {Soltwisch, Victor and Haase, Anton and Wernecke, Jan and Probst, J{\"u}rgen and Schoengen, Max and Burger, Sven and Krumrey, Michael and Scholze, Frank}, title = {Correlated diffuse x-ray scattering from periodically nanostructured surfaces}, series = {Phys. Rev. B}, volume = {94}, journal = {Phys. Rev. B}, doi = {10.1103/PhysRevB.94.035419}, pages = {035419}, language = {en} }