@misc{Pomplun2006, type = {Master Thesis}, author = {Pomplun, Jan}, title = {Rigorous FEM-Simulation of Maxwell's Equations for EUV-Lithography}, year = {2006}, language = {en} } @inproceedings{ScholzeLaubisUlmetal.2008, author = {Scholze, Frank and Laubis, Christian and Ulm, Gerhard and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation}, volume = {6921}, booktitle = {Emerging Lithographic Technologies XII}, editor = {Schellenberg, Frank}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2008, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} } @inproceedings{SchmidtPomplunZschiedrichetal.2011, author = {Schmidt, Frank and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven}, title = {Fast online simulation of 3D nanophotonic structures by the reduced basis method}, volume = {7941}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XV}, publisher = {Proc. SPIE}, doi = {10.1117/12.874726}, pages = {79410G}, year = {2011}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, volume = {8255}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1111.4393}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @article{PomplunBurgerSchmidtetal.2010, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Schliwa, Andrei and Bimberg, Dieter and Pietrzak, Agnieszka and Wenzel, Hans and Erbert, G{\"o}tz}, title = {Finite element simulation of the optical modes of semiconductor lasers}, volume = {247}, journal = {Phys. Status Solidi B}, doi = {10.1002/pssb.200945451}, pages = {846 -- 853}, year = {2010}, language = {en} } @article{PomplunBurgerZschiedrichetal.2007, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Adaptive finite element method for simulation of optical nano structures}, volume = {244}, journal = {Phys. Status Solidi B}, arxiv = {http://arxiv.org/abs/0711.2149}, doi = {10.1002/pssb.200743192}, pages = {3419 -- 3434}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @incollection{PomplunSchmidt2010, author = {Pomplun, Jan and Schmidt, Frank}, title = {Reduced Basis Method for Electromagnetic Field Computations}, booktitle = {Scientific Computing in Electrical Engineering SCEE 2008}, publisher = {Springer Berlin Heidelberg}, doi = {10.1007/978-3-642-12294-1_12}, pages = {85}, year = {2010}, language = {en} } @inproceedings{PomplunSchmidt2008, author = {Pomplun, Jan and Schmidt, Frank}, title = {Reduced Basis Method for Nano Optical Simulations}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, pages = {IWD7}, year = {2008}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @article{PomplunZschiedrichKloseetal.2007, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite element simulation of radiation losses in photonic crystal fibers}, volume = {204}, journal = {phys. stat. sol. (a)}, number = {11}, doi = {10.1002/pssa.200776414}, pages = {3822 -- 3837}, year = {2007}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @inproceedings{ZschiedrichBurgerPomplunetal.2007, author = {Zschiedrich, Lin and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Goal oriented adaptive finite element method for precise simulation of optical components}, volume = {6475}, booktitle = {Proc. SPIE, Integrated Optics}, editor = {Sidorin, Y. and Waechter, Ch.}, pages = {64750H}, year = {2007}, language = {en} } @inproceedings{ZschiedrichGreinerPomplunetal.2012, author = {Zschiedrich, Lin and Greiner, Horst and Pomplun, Jan and Hammerschmidt, Martin and Burger, Sven and Schmidt, Frank}, title = {FEM simulations of light extraction from nanostructured organic light-emitting diodes}, booktitle = {Renewable Energy and the Environment Optics and Photonics Congress}, publisher = {Optical Society of America}, doi = {10.1364/SOLED.2012.LT2B.5}, pages = {LT2B.5}, year = {2012}, language = {en} } @inproceedings{TyminskiPopescuBurgeretal.2012, author = {Tyminski, Jacek and Popescu, Raluca and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin and Matsuyama, Tomoyuki and Noda, Tomoya}, title = {Finite element models of lithographic mask topography}, volume = {8326}, booktitle = {Proc. SPIE}, editor = {Conley, W.}, doi = {10.1117/12.916957}, pages = {83261B}, year = {2012}, language = {en} } @article{ArellanoMingaleevKoltchanovetal.2013, author = {Arellano, Cristina and Mingaleev, Sergei F. and Koltchanov, Igor and Richter, Andre and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Efficient design of photonic integrated circuits (PICs) by combining device- and circuit- level simulation tools}, volume = {8627}, journal = {Proc. SPIE}, doi = {10.1117/12.2004378}, pages = {862711}, year = {2013}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Blome, Mark and Schmidt, Frank}, title = {Advanced finite-element methods for design and analysis of nano-optical structures: Applications}, volume = {8642}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4356}, doi = {10.1117/12.2001094}, pages = {864205}, year = {2013}, language = {en} } @article{BurgerZschiedrichPomplunetal.2013, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Bodermann, Bernd}, title = {Fast simulation method for parameter reconstruction in optical metrology}, volume = {8681}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1304.4367}, doi = {10.1117/12.2011154}, pages = {868119}, year = {2013}, language = {en} } @article{TyminskiPomplunZschiedrichetal.2013, author = {Tyminski, Jacek and Pomplun, Jan and Zschiedrich, Lin and Flagello, Donis and Matsuyama, Tomiyuki}, title = {Topographic mask modeling with reduced basis finite element method}, volume = {8683}, journal = {Proc. SPIE}, doi = {10.1117/12.2011613}, pages = {86831C}, year = {2013}, language = {en} } @inproceedings{WohlfeilBurgerStamatiadisetal.2014, author = {Wohlfeil, Benjamin and Burger, Sven and Stamatiadis, Christos and Pomplun, Jan and Schmidt, Frank and Zimmermann, Lars and Petermann, Klaus}, title = {Numerical Simulation of Grating Couplers for Mode Multiplexed Systems}, volume = {8988}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1403.2288}, doi = {10.1117/12.2044461}, pages = {89880K}, year = {2014}, language = {en} } @incollection{PomplunZschiedrichKloseetal.2008, author = {Pomplun, Jan and Zschiedrich, Lin and Klose, Roland and Schmidt, Frank and Burger, Sven}, title = {Finite Element Simulation of Radiation Losses in Photonic Crystal Fibers}, booktitle = {Nanophotonic Materials: Photonic Crystals, Plasmonics, and Metamaterials}, publisher = {Wiley-VCH}, doi = {10.1002/9783527621880.ch17}, pages = {313 -- 331}, year = {2008}, language = {en} } @inproceedings{WenzelCrumpEkhteraeietal.2011, author = {Wenzel, Hans and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Erbert, G{\"o}tz}, title = {Theoretical and experimental analysis of the lateral modes of high-power broad-area lasers}, booktitle = {Numerical Simulation of Optoelectronic Devices}, doi = {10.1109/NUSOD.2011.6041183}, pages = {143 -- 144}, year = {2011}, language = {en} } @inproceedings{HammerschmidtPomplunBurgeretal.2014, author = {Hammerschmidt, Martin and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Adaptive sampling strategies for effcient parameter scans in nano-photonic device simulations}, volume = {8980}, booktitle = {Proc. SPIE}, publisher = {SPIE}, doi = {10.1117/12.2036363}, pages = {89801O}, year = {2014}, language = {en} } @phdthesis{Pomplun2010, author = {Pomplun, Jan}, title = {Reduced basis method for electromagnetic scattering problems}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:188-fudissthesis000000017571-3}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} } @inproceedings{BurgerPomplunSchmidtetal.2011, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank and Zschiedrich, Lin}, title = {Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.875044}, pages = {79330T}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @incollection{BurgerPomplunSchmidt2012, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Finite Element Methods for Computational Nano-optics}, booktitle = {Encyclopedia of Nanotechnology}, editor = {Bhushan, B.}, publisher = {Springer Netherlands}, doi = {10.1007/978-90-481-9751-4_17}, pages = {837 -- 843}, year = {2012}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{BurgerGutscheHammerschmidtetal.2015, author = {Burger, Sven and Gutsche, Philipp and Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Schmidt, Frank and Wohlfeil, Benjamin and Zschiedrich, Lin}, title = {Hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures}, volume = {9630}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1510.02607}, doi = {10.1117/12.2190119}, pages = {96300S}, year = {2015}, language = {en} } @misc{HammerschmidtHerrmannPomplunetal.2015, author = {Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for Maxwell's equations with resonance phenomena}, volume = {9630}, journal = {Proc. SPIE}, issn = {1438-0064}, doi = {10.1117/12.2190425}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-55687}, pages = {96300R}, year = {2015}, abstract = {Rigorous optical simulations of 3-dimensional nano-photonic structures are an important tool in the analysis and optimization of scattering properties of nano-photonic devices or parameter reconstruction. To construct geometrically accurate models of complex structured nano-photonic devices the finite element method (FEM) is ideally suited due to its flexibility in the geometrical modeling and superior convergence properties. Reduced order models such as the reduced basis method (RBM) allow to construct self-adaptive, error-controlled, very low dimensional approximations for input-output relationships which can be evaluated orders of magnitude faster than the full model. This is advantageous in applications requiring the solution of Maxwell's equations for multiple parameters or a single parameter but in real time. We present a reduced basis method for 3D Maxwell's equations based on the finite element method which allows variations of geometric as well as material and frequency parameters. We demonstrate accuracy and efficiency of the method for a light scattering problem exhibiting a resonance in the electric field.}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2015, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Herrmann, Sven and Schmidt, Frank}, title = {hp-finite element method for simulating light scattering from complex 3D structures}, volume = {9424}, booktitle = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1503.06617}, doi = {10.1117/12.2085795}, pages = {94240Z}, year = {2015}, language = {en} } @misc{HammerschmidtPomplunBurgeretal.2014, author = {Hammerschmidt, Martin and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Adaptive sampling strategies for efficient parameter scans in nano-photonic device simulations}, issn = {1438-0064}, doi = {10.1117/12.2036363}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-50395}, year = {2014}, abstract = {Rigorous optical simulations are an important tool in optimizing scattering properties of nano-photonic devices and are used, for example, in solar cell optimization. The finite element method (FEM) yields rigorous, time-harmonic, high accuracy solutions of the full 3D vectorial Maxwell's equations [1] and furthermore allows for great flexibility and accuracy in the geometrical modeling of these often complex shaped 3D nano-structures. A major drawback of frequency domain methods is the limitation of single frequency evaluations. For example the accurate computation of the short circuit current density of an amorphous silicon / micro-crystalline multi-junction thin film solar cell may require the solution of Maxwell's equations for over a hundred different wavelengths if an equidistant sampling strategy is employed. Also in optical metrology, wavelength scans are frequently used to reconstruct unknown geometrical and material properties of optical systems numerically from measured scatterometric data. In our contribution we present several adaptive numerical integration and sampling routines and study their efficiency in the context of the determination of generation rate profiles of solar cells. We show that these strategies lead to a reduction in the computational effort without loss of accuracy. We discuss the employment of tangential information in a Hermite interpolation scheme to achieve similar accuracy on coarser grids. We explore the usability of these strategies for scatterometry and solar cell simulations.}, language = {en} } @misc{HammerschmidtHerrmannBurgeretal.2016, author = {Hammerschmidt, Martin and Herrmann, Sven and Burger, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Reduced basis method for the optimization of nano-photonic devices}, issn = {1438-0064}, doi = {10.1007/s11082-016-0530-1}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-57556}, year = {2016}, abstract = {Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occuring e. g. in optical metrology. The reduced basis method presented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources.}, language = {en} } @misc{HammerschmidtHerrmannPomplunetal.2016, author = {Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures}, volume = {9742}, journal = {Proc. SPIE}, issn = {1438-0064}, doi = {10.1117/12.2212367}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-57239}, pages = {97420M}, year = {2016}, abstract = {Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modeling and numerical accuracy atcomputational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scatteringoptical wavelengths off periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.}, language = {en} } @misc{HammerschmidtBarthPomplunetal.2016, author = {Hammerschmidt, Martin and Barth, Carlo and Pomplun, Jan and Burger, Sven and Becker, Christiane and Schmidt, Frank}, title = {Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs}, issn = {1438-0064}, doi = {10.1117/12.2212482}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-57249}, year = {2016}, abstract = {Maxwell solvers based on the hp-adaptive finite element method allow for accurate geometrical modeling and high numerical accuracy. These features are indispensable for the optimization of optical properties or reconstruction of parameters through inverse processes. High computational complexity prohibits the evaluation of the solution for many parameters. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem allowing to compute solutions for a parameter configuration orders of magnitude faster. The RBM allows to evaluate linear and nonlinear outputs of interest like Fourier transform or the enhancement of the electromagnetic field in milliseconds. We apply the RBM to compute light-scattering off two dimensional photonic crystal structures made of silicon and reconstruct geometrical parameters.}, language = {en} } @inproceedings{BurgerHammerschmidtHerrmannetal.2015, author = {Burger, Sven and Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Schmidt, Frank}, title = {Reduced basis methods for optimization of nano-photonic devices}, booktitle = {Proc. Int. Conf. Numerical Simulation of Optoelectronic Devices (NUSOD)}, doi = {10.1109/NUSOD.2015.7292871}, pages = {159}, year = {2015}, language = {en} } @article{PomplunBurgerZschiedrichetal.2016, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Gutsche, Philipp and Schmidt, Frank}, title = {Method for fast computation of angular light scattering spectra from 2D periodic arrays}, volume = {9778}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1603.04169}, doi = {10.1117/12.2219666}, pages = {977839}, year = {2016}, language = {en} } @article{HammerschmidtBarthPomplunetal.2016, author = {Hammerschmidt, Martin and Barth, Carlo and Pomplun, Jan and Burger, Sven and Becker, Christiane and Schmidt, Frank}, title = {Reconstruction of photonic crystal geometries using a reduced basis method for nonlinear outputs}, volume = {9756}, journal = {Proc. SPIE}, doi = {10.1117/12.2212482}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-58187}, pages = {97561R}, year = {2016}, abstract = {Maxwell solvers based on the hp-adaptive finite element method allow for accurate geometrical modeling and high numerical accuracy. These features are indispensable for the optimization of optical properties or reconstruction of parameters through inverse processes. High computational complexity prohibits the evaluation of the solution for many parameters. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem allowing to compute solutions for a parameter configuration orders of magnitude faster. The RBM allows to evaluate linear and nonlinear outputs of interest like Fourier transform or the enhancement of the electromagnetic field in milliseconds. We apply the RBM to compute light-scattering off two dimensional photonic crystal structures made of silicon and reconstruct geometrical parameters.}, language = {en} } @article{HammerschmidtHerrmannPomplunetal.2016, author = {Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Model order reduction for the time-harmonic Maxwell equation applied to complex nanostructures}, volume = {9742}, journal = {Proc. SPIE}, doi = {10.1117/12.2212367}, pages = {97420M}, year = {2016}, abstract = {Fields such as optical metrology and computational lithography require fast and efficient methods for solving the time-harmonic Maxwell's equation. Highly accurate geometrical modelling and numerical accuracy at low computational costs are a prerequisite for any simulation study of complex nano-structured photonic devices. We present a reduced basis method (RBM) for the time-harmonic electromagnetic scattering problem based on the hp-adaptive finite element solver JCMsuite capable of handling geometric and non-geometric parameter dependencies allowing for online evaluations in milliseconds. We apply the RBM to compute light-scattering at optical wavelengths of periodic arrays of fin field-effect transistors (FinFETs) where geometrical properties such as the width and height of the fin and gate can vary in a large range.}, language = {en} } @article{HammerschmidtHerrmannPomplunetal.2016, author = {Hammerschmidt, Martin and Herrmann, Sven and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for electromagnetic scattering problem: a case study for FinFETs}, volume = {48}, journal = {Optical and Quantum Electronics}, doi = {10.1007/s11082-016-0530-1}, pages = {250}, year = {2016}, abstract = {Optical 3D simulations in many-query and real-time contexts require new solution strategies. We study an adaptive, error controlled reduced basis method for solving parametrized time-harmonic optical scattering problems. Application fields are, among others, design and optimization problems of nano-optical devices as well as inverse problems for parameter reconstructions occurring e. g. in optical metrology. The reduced basis method pre- sented here relies on a finite element modeling of the scattering problem with parametrization of materials, geometries and sources.}, language = {en} }