@inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @inproceedings{HeckelEhrigGolasetal.2012, author = {Heckel, R. and Ehrig, Hartmut and Golas, Ulrike and Hermann, Frank}, title = {Parallelism and Concurrency of Stochastic Graph Transformations}, series = {Proceedings of ICGT 2012}, volume = {7562}, booktitle = {Proceedings of ICGT 2012}, editor = {Ehrig, Hartmut and Engels, G. and Kreowski, H.-J. and Rozenberg, G.}, publisher = {Springer}, doi = {10.1007/978-3-642-33654-6_7}, pages = {96 -- 110}, year = {2012}, language = {en} }