@inproceedings{KruegerBodermannKoeningetal.2023, author = {Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Manley, Phillip and Zschiedrich, Lin and Schneider, Philipp-Immanuel and Heinrich, Andreas and Eder, Christian and Zeiser, Ulrike and Goehnermeier, Aksel}, title = {On aberration retrieval for optical microscopes in length metrology}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2672294}, pages = {PC126190A}, year = {2023}, language = {en} } @inproceedings{ManleyKruegerBodermannetal.2023, author = {Manley, Phillip and Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Heinrich, Andreas and Eder, Christian and Goehnermeier, Aksel and Zeiser, Ulrike and Hammerschmidt, Martin and Zschiedrich, Lin and Schneider, Philipp-Immanuel}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673077}, pages = {PC126190B}, year = {2023}, language = {en} } @inproceedings{MukherjeeBurgerSiefkeetal.2024, author = {Mukherjee, Deshabrato and Burger, Sven and Siefke, Thomas and Gour, Jeetendra and Bodermann, Bernd and Petrik, Peter}, title = {Modeling of dimensions and sensing properties of gold gratings by spectroscopic ellipsometry and finite element method}, volume = {309}, booktitle = {EPJ Web of Conferences}, doi = {10.1051/epjconf/202430902016}, pages = {02016}, year = {2024}, language = {en} } @inproceedings{KruegerManleyZschiedrichetal.2022, author = {Kr{\"u}ger, Jan and Manley, Phillip and Zschiedrich, Lin and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and K{\"o}ning, Rainer and Bodermann, Bernd}, title = {Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie}, booktitle = {Proc. DGaO}, url = {http://nbn-resolving.de/urn:nbn:de:0287-2022-P005-6}, pages = {P5}, year = {2022}, language = {en} } @inproceedings{ManleyKruegerZschiedrichetal.2022, author = {Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and Hammerschmidt, Martin and Bodermann, Bernd and K{\"o}ning, Rainer and Schneider, Philipp-Immanuel}, title = {Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy}, volume = {266}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202226610010}, pages = {10010}, year = {2022}, language = {en} }