@inproceedings{AgcosBodermannBurgeretal., author = {Agcos, Emil and Bodermann, Bernd and Burger, Sven and Dai, Gaoliang and Endres, Johannes and Hansen, Poul-Erik and Nielson, Lars and Madsen, Morten and Heidenreich, Sebastian and Krumrey, Michael and Loechel, Bernd and Probst, J{\"u}rgen and Scholze, Frank and Soltwisch, Victor and Wurm, Matthias}, title = {Scatterometry reference standards to improve tool matching and traceability in lithographical nanomanufacturing}, series = {Proc. SPIE}, volume = {9556}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2190409}, pages = {955610}, language = {en} } @inproceedings{BodermannHansenBurgeretal.2012, author = {Bodermann, Bernd and Hansen, Poul-Erik and Burger, Sven and Henn, Mark-Alexander and Gross, Hermann and B{\"a}r, Markus and Scholze, Frank and Endres, Johannes and Wurm, Matthias}, title = {First steps towards a scatterometry reference standard}, series = {Proc. SPIE}, volume = {8466}, booktitle = {Proc. SPIE}, doi = {10.1117/12.929903}, pages = {84660E}, year = {2012}, language = {en} } @inproceedings{ScholzeBodermannBurgeretal., author = {Scholze, Frank and Bodermann, Bernd and Burger, Sven and Endres, Johannes and Haase, Anton and Krumrey, Michael and Laubis, Christian and Soltwisch, Victor and Ullrich, Albrecht and Wernecke, Jan}, title = {Determination of line profiles on photomasks using DUV, EUV and X-ray scattering}, series = {Proc. SPIE}, volume = {9231}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2065941}, pages = {92310M}, language = {en} } @inproceedings{KruegerManleyZschiedrichetal., author = {Kr{\"u}ger, Jan and Manley, Phillip and Zschiedrich, Lin and Hammerschmidt, Martin and Schneider, Philipp-Immanuel and K{\"o}ning, Rainer and Bodermann, Bernd}, title = {Untersuchung des Schwingungseinflusses auf gemessene Punktspreizfunktionen in der optischen Mikroskopie}, series = {Proc. DGaO}, booktitle = {Proc. DGaO}, url = {http://nbn-resolving.de/urn:nbn:de:0287-2022-P005-6}, pages = {P5}, language = {en} } @inproceedings{ManleyKruegerZschiedrichetal., author = {Manley, Phillip and Kr{\"u}ger, Jan and Zschiedrich, Lin and Hammerschmidt, Martin and Bodermann, Bernd and K{\"o}ning, Rainer and Schneider, Philipp-Immanuel}, title = {Elementary, my dear Zernike: model order reduction for accelerating optical dimensional microscopy}, series = {EPJ Web Conf.}, volume = {266}, booktitle = {EPJ Web Conf.}, doi = {10.1051/epjconf/202226610010}, pages = {10010}, language = {en} } @inproceedings{ManleyKruegerBodermannetal., author = {Manley, Phillip and Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Heinrich, Andreas and Eder, Christian and Goehnermeier, Aksel and Zeiser, Ulrike and Hammerschmidt, Martin and Zschiedrich, Lin and Schneider, Philipp-Immanuel}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673077}, pages = {PC126190B}, language = {en} } @inproceedings{KruegerBodermannKoeningetal., author = {Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Manley, Phillip and Zschiedrich, Lin and Schneider, Philipp-Immanuel and Heinrich, Andreas and Eder, Christian and Zeiser, Ulrike and Goehnermeier, Aksel}, title = {On aberration retrieval for optical microscopes in length metrology}, series = {Proc. SPIE}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2672294}, pages = {PC126190A}, language = {en} }