@inproceedings{ZschiedrichSchmidt2008, author = {Zschiedrich, Lin and Schmidt, Frank}, title = {Finite element simulation of light propagation in non-periodic mask patterns}, series = {Photomask and Next-Generation Lithography Mask Technology XV}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{ZschiedrichSchmidtPomplunetal., author = {Zschiedrich, Lin and Schmidt, Frank and Pomplun, Jan and Burger, Sven}, title = {Finite elements for nano-optics applications}, series = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, booktitle = {Proc. Europ. Opt. Soc. Ann. Meet. 2016 (EOSAM)}, isbn = {978-1-5108-4796-5}, pages = {178}, language = {en} }