@inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, series = {Microtechnologies for the New Millenium}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2003, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems}, series = {Dig. LEOS/IEEE 2003 Summer Topicals}, booktitle = {Dig. LEOS/IEEE 2003 Summer Topicals}, doi = {10.1109/LEOSST.2003.1224282}, pages = {75}, year = {2003}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, series = {International Workshop on Photonic Nanomaterials}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, series = {Silicon Photonics V}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, series = {Photonic and Phononic Crystal Materials and Devices X}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} } @inproceedings{BurgerSchaedleZschiedrichetal.2006, author = {Burger, Sven and Sch{\"a}dle, Achim and Zschiedrich, Lin and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Nanophotonics}, volume = {6195}, booktitle = {Nanophotonics}, editor = {Andrews, David L. and Nunzi, Jean-Michel and Ostendorf, Andreas}, publisher = {Proc. SPIE}, doi = {10.1117/12.662942}, pages = {72 -- 82}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichKloseetal.2005, author = {Burger, Sven and Zschiedrich, Lin and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Enkrich, Christian and Linden, S. and Wegener, M. and Soukoulis, C.}, title = {Numerical Investigation of Light Scattering off Split-Ring Resonators}, series = {Metamaterials}, volume = {5955}, booktitle = {Metamaterials}, editor = {Szoplik, T. and {\"O}zbay, E. and Soukoulis, C. and Zheludev, N.}, publisher = {Proc. SPIE}, doi = {10.1117/12.622184}, pages = {18 -- 26}, year = {2005}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2009, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kettner, Benjamin and Lockau, D.}, title = {3D Finite-Element Simulations of Enhanced Light Transmission Through Arrays of Holes in Metal Films}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827543}, pages = {73900H}, year = {2009}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2010, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Finite element method for accurate 3D simulation of plasmonic waveguides}, series = {Integrated Optics: Devices, Materials, and Technologies XIV}, volume = {7604}, booktitle = {Integrated Optics: Devices, Materials, and Technologies XIV}, publisher = {Proc. SPIE}, doi = {10.1117/12.841995}, pages = {76040F}, year = {2010}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {JCMsuite: An Adaptive FEM Solver for Precise Simulations in Nano-Optics}, series = {Integrated Photonics and Nanophotonics Research and Applications}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, doi = {10.1364/IPNRA.2008.ITuE4}, pages = {ITuE4}, year = {2008}, language = {en} } @inproceedings{BurgerKloseMaerzetal.2004, author = {Burger, Sven and Klose, Roland and M{\"a}rz, Reinhard and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {Efficient Finite Element Methods for the Design of Microoptical Components}, series = {Proc. Microoptics Conf. 2004}, booktitle = {Proc. Microoptics Conf. 2004}, year = {2004}, language = {en} } @inproceedings{BurgerKloseSchaedleetal.2005, author = {Burger, Sven and Klose, Roland and Sch{\"a}dle, Achim and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM modelling of 3D photonic crystals and photonic crystal waveguides}, series = {Integrated Optics : Devices, Materials and Technologies IX}, volume = {5728}, booktitle = {Integrated Optics : Devices, Materials and Technologies IX}, editor = {Sidorin, Y. and W{\"a}chter, Christoph}, publisher = {Proc. SPIE}, doi = {10.1117/12.585895}, pages = {164 -- 173}, year = {2005}, language = {en} } @inproceedings{ScholzeLaubisDerschetal.2007, author = {Scholze, Frank and Laubis, Christian and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {The influence of line edge roughness and CD uniformity on EUV scatterometry for CD characterization of EUV masks}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, pages = {66171A}, year = {2007}, language = {en} } @inproceedings{PomplunSchmidt2009, author = {Pomplun, Jan and Schmidt, Frank}, title = {Reduced basis method for fast and robust simulation of electromagnetic scattering problems}, series = {Numerical Methods in Optical Metrology}, volume = {7390}, booktitle = {Numerical Methods in Optical Metrology}, publisher = {Proc. SPIE}, doi = {10.1117/12.827588}, pages = {73900I}, year = {2009}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2009, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank}, title = {Reduced basis method for computational lithography}, series = {Photomask Technology}, volume = {7488}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.829639}, pages = {74882B}, year = {2009}, language = {en} } @inproceedings{PhilippowSchmidt1987, author = {Philippow, E. and Schmidt, Frank}, title = {Besondere L{\"o}sungen in harmonisch erregten Ferroresonanz-Kreisen}, series = {4. Internationales Symposium Theoretische Elektrotechnik Ilmenau}, volume = {2}, booktitle = {4. Internationales Symposium Theoretische Elektrotechnik Ilmenau}, pages = {26 -- 32}, year = {1987}, language = {en} } @inproceedings{SchmidtBurgerPomplunetal.2008, author = {Schmidt, Frank and Burger, Sven and Pomplun, Jan and Zschiedrich, Lin}, title = {Advanced FEM analysis of optical waveguides: algorithms and applications}, series = {Integrated Optics}, volume = {6896}, booktitle = {Integrated Optics}, editor = {Greiner, Christoph and W{\"a}chter, Christoph}, publisher = {SPIE}, doi = {10.1117/12.765720}, pages = {689602}, year = {2008}, language = {en} } @inproceedings{SchmidtBurgerSchaedleetal.2005, author = {Schmidt, Frank and Burger, Sven and Sch{\"a}dle, Achim and Klose, Roland}, title = {Finite element methods for optical device design}, series = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, booktitle = {Proceedings of the 5th International Conference on Numerical Simulation of Optoelectronic devices}, doi = {10.1109/NUSOD.2005.1518133}, pages = {57 -- 58}, year = {2005}, language = {en} } @inproceedings{SchmidtDeuflhard1994, author = {Schmidt, Frank and Deuflhard, Peter}, title = {Discrete Transparent Boundary Conditions for Fresnel's Equation}, series = {Integrated Photonics Research}, booktitle = {Integrated Photonics Research}, address = {San Francisco, California, USA}, pages = {45 -- 47}, year = {1994}, language = {en} } @inproceedings{Schmidt2000, author = {Schmidt, Frank}, title = {Discrete Nonreflecting Boundary Conditions for the Helmholtz equation}, series = {Fifth International Conference on Mathematical and Numerical Aspects of Wave Propagation}, booktitle = {Fifth International Conference on Mathematical and Numerical Aspects of Wave Propagation}, editor = {Berm{\´u}dez, A. and G{\´o}mez, D. and Hazard, C. and Joly, P. and Roberts, J.}, address = {Waves 2000, Santiago de Compostella, Spain}, pages = {921 -- 925}, year = {2000}, language = {en} } @inproceedings{ScholzeLaubisUlmetal.2008, author = {Scholze, Frank and Laubis, Christian and Ulm, Gerhard and Dersch, Uwe and Pomplun, Jan and Burger, Sven and Schmidt, Frank}, title = {Evaluation of EUV scatterometry for CD characterization of EUV masks using rigorous FEM-simulation}, series = {Emerging Lithographic Technologies XII}, volume = {6921}, booktitle = {Emerging Lithographic Technologies XII}, editor = {Schellenberg, Frank}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2008, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Metrology of EUV masks by EUV-scatterometry and finite element analysis}, series = {Photomask and Next-Generation Lithography Mask Technology XV}, volume = {7028}, booktitle = {Photomask and Next-Generation Lithography Mask Technology XV}, editor = {Horiuchi, Toshiyuki}, publisher = {SPIE}, year = {2008}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2006, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Zschiedrich, Lin and Scholze, Frank}, title = {Rigorous FEM-Simulation of EUV-Masks: Influence of shape and material parameters}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, doi = {10.1117/12.686828}, pages = {63493D}, year = {2006}, language = {en} } @inproceedings{PomplunBurgerSchmidtetal.2007, author = {Pomplun, Jan and Burger, Sven and Schmidt, Frank and Scholze, Frank and Laubis, Christian and Dersch, Uwe}, title = {Finite element analysis of EUV lithography}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726156}, pages = {661718}, year = {2007}, language = {en} } @inproceedings{PomplunHolzloehnerBurgeretal.2007, author = {Pomplun, Jan and Holzl{\"o}hner, Ronald and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {FEM investigation of leaky modes in hollow core photonic crystal fibers}, series = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, volume = {6480}, booktitle = {Proc. SPIE, Photonic Crystal Materials and Devices VI}, editor = {Adibi, Ali and Scherer, Axel and Lin, Shawn-Yu}, pages = {64800M}, year = {2007}, language = {en} } @inproceedings{PomplunSchmidt2008, author = {Pomplun, Jan and Schmidt, Frank}, title = {Reduced Basis Method for Nano Optical Simulations}, series = {Integrated Photonics and Nanophotonics Research and Applications}, booktitle = {Integrated Photonics and Nanophotonics Research and Applications}, publisher = {Optical Society of America}, pages = {IWD7}, year = {2008}, language = {en} } @inproceedings{PomplunSchmidtBurgeretal.2010, author = {Pomplun, Jan and Schmidt, Frank and Burger, Sven and Zschiedrich, Lin}, title = {Adaptive Reduced Basis Method for Optical Scattering Problems}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWD4}, pages = {IWD4}, year = {2010}, language = {en} } @inproceedings{PomplunBurgerZschiedrichetal.2011, author = {Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Reduced basis method for real-time inverse scatterometry}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889892}, pages = {808308}, year = {2011}, language = {en} } @inproceedings{PomplunWenzelBurgeretal.2012, author = {Pomplun, Jan and Wenzel, Hans and Burger, Sven and Zschiedrich, Lin and Rozova, Maria and Schmidt, Frank and Crump, Paul and Ekhteraei, Hossein and Schultz, Christoph M. and Erbert, G{\"o}tz}, title = {Thermo-optical simulation of high-power diode lasers}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.909330}, pages = {825510}, year = {2012}, language = {en} } @inproceedings{Schmidt1994, author = {Schmidt, Frank}, title = {Phase-adaptive basis functions for a multilevel finite element solution of the paraxial wave equation}, series = {Euro-Opto Series}, booktitle = {Euro-Opto Series}, editor = {G. C. Righini, D.}, address = {Lindau, Germany}, pages = {57 -- 61}, year = {1994}, language = {en} } @inproceedings{Schmidt1998, author = {Schmidt, Frank}, title = {Simulation of Scattering and Reflection Problems via Solution of the 2D Helmholtz Equation}, series = {Integrated Photonics Research}, volume = {4}, booktitle = {Integrated Photonics Research}, pages = {408 -- 410}, year = {1998}, language = {en} } @inproceedings{RozovaPomplunZschiedrichetal.2012, author = {Rozova, Maria and Pomplun, Jan and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven}, title = {3D finite element simulation of optical modes in VCSELs}, series = {Proc. SPIE}, volume = {8255}, booktitle = {Proc. SPIE}, doi = {10.1117/12.906372}, pages = {82550K}, year = {2012}, language = {en} } @inproceedings{BurgerZschiedrichSchaedleetal.2006, author = {Burger, Sven and Zschiedrich, Lin and Sch{\"a}dle, Achim and Klose, Roland and Kettner, Benjamin and Pomplun, Jan and Pollok, T. and Schmidt, Frank}, title = {Advanced FEM Analysis of Nano-Optical Devices}, series = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, booktitle = {Proc. Symposium on Photonics Technologies for the 7th Framework Programme}, year = {2006}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and Henkel, Thomas and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {3D simulations of electromagnetic fields in nanostructures using the time-harmonic finite-element method}, series = {Modeling Aspects in Optical Metrology}, volume = {6617}, booktitle = {Modeling Aspects in Optical Metrology}, editor = {Bosse, Harald}, publisher = {Proc. SPIE}, doi = {10.1117/12.726236}, pages = {66170V}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2007, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and K{\"o}hle, Roderick and K{\"u}chler, Bernd and N{\"o}lscher, Christoph}, title = {EMF Simulations of Isolated and Periodic 3D Photomask Patterns}, series = {Photomask Technology}, volume = {6730}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, pages = {6630}, year = {2007}, language = {en} } @inproceedings{BurgerZschiedrichSchmidtetal.2008, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank and Evanschitzky, Peter and Erdmann, Andreas}, title = {Benchmark of rigorous methods for electromagnetic field simulation}, series = {Photomask Technology}, volume = {7122}, booktitle = {Photomask Technology}, editor = {Kawahira, H. and Zurbrick, L. S.}, publisher = {Proc. SPIE}, doi = {10.1117/12.801248}, pages = {71221}, year = {2008}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank}, title = {Rigorous simulations of 3D patterns on extreme ultraviolet lithography masks}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, editor = {Bodermann, Bernd}, publisher = {Proc. SPIE}, doi = {10.1117/12.889831}, pages = {80831B}, year = {2011}, language = {en} } @inproceedings{BurgerZschiedrichPomplunetal.2011, author = {Burger, Sven and Zschiedrich, Lin and Pomplun, Jan and Schmidt, Frank and Kato, Akiko and Laubis, Christian and Scholze, Frank}, title = {Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations}, series = {Photomask Technology 2011}, volume = {8166}, booktitle = {Photomask Technology 2011}, publisher = {Proc. SPIE}, doi = {10.1117/12.896839}, pages = {81661Q}, year = {2011}, language = {en} } @inproceedings{BurgerPomplunSchmidtetal.2011, author = {Burger, Sven and Pomplun, Jan and Schmidt, Frank and Zschiedrich, Lin}, title = {Finite-element method simulations of high-Q nanocavities with 1D photonic bandgap}, series = {Physics and Simulation of Optoelectronic Devices XIX}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.875044}, pages = {79330T}, year = {2011}, language = {en} } @inproceedings{DeuflhardFrieseSchmidtetal.1996, author = {Deuflhard, Peter and Friese, T. and Schmidt, Frank and M{\"a}rz, Reinhard and Nolting, Hans-Peter}, title = {Effiziente Eigenmodenberechnung f{\"u}r den Entwurf integriert-optischer Chips}, series = {Mathematik - Schl{\"u}sseltechnologie f{\"u}r die Zukunft}, booktitle = {Mathematik - Schl{\"u}sseltechnologie f{\"u}r die Zukunft}, editor = {et al. Hoffmann, K.-H.}, publisher = {Springer Verlag}, pages = {267 -- 279}, year = {1996}, language = {en} } @inproceedings{FrieseDeuflhardSchmidt1999, author = {Friese, T. and Deuflhard, Peter and Schmidt, Frank}, title = {A Multigrid Method for the Complex Helmholtz Eigenvalue Problem}, series = {Procs. Eleventh International Conference on Domain Decomposition Methods in Sciences and Engineering (DD11), UK}, booktitle = {Procs. Eleventh International Conference on Domain Decomposition Methods in Sciences and Engineering (DD11), UK}, editor = {Lai, Choi-Hong and Bj{\o}rstad, Petter E. and Cross, Mark and Widlund, Olof}, publisher = {DDM.org}, pages = {19 -- 26}, year = {1999}, language = {en} } @inproceedings{HohageSchmidtZschiedrich2002, author = {Hohage, Thorsten and Schmidt, Frank and Zschiedrich, Lin}, title = {A new method for the solution of scattering problems}, series = {Proceedings of the JEE'02 Symposium}, booktitle = {Proceedings of the JEE'02 Symposium}, editor = {Michielsen, Bas and Decav{\`e}le, Francine}, publisher = {ONERA}, address = {Toulouse}, pages = {251 -- 256}, year = {2002}, language = {en} } @inproceedings{LockauZschiedrichSchmidtetal.2009, author = {Lockau, D. and Zschiedrich, Lin and Schmidt, Frank and Burger, Sven and Rech, Bernd}, title = {Efficient simulation of plasmonic structures for solar cells}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {48}, year = {2009}, language = {en} } @inproceedings{LockauZschiedrichBurgeretal.2011, author = {Lockau, D. and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Ruske, F. and Rech, Bernd}, title = {Rigorous optical simulation of light management in crystalline silicon thin film solar cells with rough interface textures}, series = {Physics and Simulation of Optoelectronic Devices XIX}, volume = {7933}, booktitle = {Physics and Simulation of Optoelectronic Devices XIX}, publisher = {Proc. SPIE}, doi = {10.1117/12.874967}, pages = {79330M}, year = {2011}, language = {en} } @inproceedings{KleemannKurzHetzleretal.2011, author = {Kleemann, B. and Kurz, J. and Hetzler, J. and Pomplun, Jan and Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {Fast online inverse scattering with Reduced Basis Method (RBM) for a 3D phase grating with specific line roughness}, series = {Modelling Aspects in Optical Metrology III}, volume = {8083}, booktitle = {Modelling Aspects in Optical Metrology III}, publisher = {Proc. SPIE}, doi = {10.1117/12.889364}, pages = {808309}, year = {2011}, language = {en} }