@inproceedings{BurgerKleemannZschiedrichetal.2009, author = {Burger, Sven and Kleemann, B. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-Element Simulations of Light Propagation through Circular Subwavelength Apertures}, series = {Microtechnologies for the New Millenium}, volume = {7366}, booktitle = {Microtechnologies for the New Millenium}, publisher = {Proc. SPIE}, doi = {10.1117/12.822828}, pages = {736621}, year = {2009}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2006, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Nguyen, H. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Rigorous Simulation of 3D Masks}, series = {Photomask Technology}, volume = {6349}, booktitle = {Photomask Technology}, editor = {Martin, P. and Naber, R.}, publisher = {Proc. SPIE}, pages = {63494Z}, year = {2006}, language = {en} } @inproceedings{BurgerKoehleZschiedrichetal.2005, author = {Burger, Sven and K{\"o}hle, Roderick and Zschiedrich, Lin and Gao, W. and Schmidt, Frank and M{\"a}rz, Reinhard and N{\"o}lscher, Christoph}, title = {Benchmark of FEM, Waveguide and FDTD Algorithms for Rigorous Mask Simulation}, series = {Photomask Technology}, volume = {5992}, booktitle = {Photomask Technology}, editor = {Weed, J. and Martin, P.}, publisher = {Proc. SPIE}, doi = {10.1117/12.631696}, pages = {378 -- 389}, year = {2005}, language = {en} } @inproceedings{BurgerLockauZschiedrichetal.2009, author = {Burger, Sven and Lockau, D. and Zschiedrich, Lin and Schmidt, Frank}, title = {Finite-element simulations of light propagation through subwavelength apertures in metal films}, series = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, volume = {XVIII}, booktitle = {International Workshop on Optical Waveguide Theory and Numerical Modelling}, publisher = {Fraunhofer Institute for Applied Optics and Precision Engineering}, pages = {59}, year = {2009}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2003, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {A fast and efficient Finite-Element Solver for 2D and 3D Photonic Band-Gap Problems}, series = {Dig. LEOS/IEEE 2003 Summer Topicals}, booktitle = {Dig. LEOS/IEEE 2003 Summer Topicals}, doi = {10.1109/LEOSST.2003.1224282}, pages = {75}, year = {2003}, language = {en} } @inproceedings{BurgerZschiedrichSchmidt2010, author = {Burger, Sven and Zschiedrich, Lin and Schmidt, Frank}, title = {3D FEM Simulations of High-Q Resonances in Photonic Crystal Microcavities}, series = {Integrated Photonics Research, Silicon and Nanophotonics}, booktitle = {Integrated Photonics Research, Silicon and Nanophotonics}, publisher = {OSA}, doi = {10.1364/IPRSN.2010.IWB7}, pages = {IWB7}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {FEM simulation of resonances in low-Q cavities for plasmon lasers}, series = {International Workshop on Photonic Nanomaterials}, booktitle = {International Workshop on Photonic Nanomaterials}, editor = {Jena, Friedrich-Schiller-Universit{\"a}t}, isbn = {978-3-00-031358-5}, pages = {36}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical investigation of optical resonances in circular grating resonators}, series = {Silicon Photonics V}, volume = {7606}, booktitle = {Silicon Photonics V}, publisher = {Proc. SPIE}, doi = {10.1117/12.842061}, pages = {760610}, year = {2010}, language = {en} } @inproceedings{BurgerSchmidtZschiedrich2010, author = {Burger, Sven and Schmidt, Frank and Zschiedrich, Lin}, title = {Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides}, series = {Photonic and Phononic Crystal Materials and Devices X}, volume = {7609}, booktitle = {Photonic and Phononic Crystal Materials and Devices X}, publisher = {Proc. SPIE}, doi = {10.1117/12.841867}, pages = {76091Q}, year = {2010}, language = {en} } @inproceedings{PomplunZschiedrichBurgeretal.2010, author = {Pomplun, Jan and Zschiedrich, Lin and Burger, Sven and Schmidt, Frank and Tyminski, Jacek and Flagello, Donis and Toshiharu, N.}, title = {Reduced basis method for source mask optimization}, series = {Photomask Technology}, volume = {7823}, booktitle = {Photomask Technology}, publisher = {Proc. SPIE}, doi = {10.1117/12.866101}, pages = {78230E}, year = {2010}, language = {en} }