@article{HammerschmidtSchneiderSantiagoetal.2018, author = {Hammerschmidt, Martin and Schneider, Philipp-Immanuel and Santiago, Xavier Garcia and Zschiedrich, Lin and Weiser, Martin and Burger, Sven}, title = {Solving inverse problems appearing in design and metrology of diffractive optical elements by using Bayesian optimization}, volume = {10694}, journal = {Proc. SPIE}, doi = {10.1117/12.2315468}, pages = {1069407}, year = {2018}, language = {en} } @misc{HammerschmidtWeiserSantiagoetal.2017, author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, issn = {1438-0064}, url = {http://nbn-resolving.de/urn:nbn:de:0297-zib-64704}, year = {2017}, abstract = {We present a Newton-like method to solve inverse problems and to quantify parameter uncertainties. We apply the method to parameter reconstruction in optical scatterometry, where we take into account a priori information and measurement uncertainties using a Bayesian approach. Further, we discuss the influence of numerical accuracy on the reconstruction result.}, language = {en} } @article{HammerschmidtWeiserSantiagoetal.2017, author = {Hammerschmidt, Martin and Weiser, Martin and Santiago, Xavier Garcia and Zschiedrich, Lin and Bodermann, Bernd and Burger, Sven}, title = {Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion}, volume = {10330}, journal = {Proc. SPIE}, arxiv = {http://arxiv.org/abs/1707.08467}, doi = {10.1117/12.2270596}, pages = {1033004}, year = {2017}, language = {en} }