@article{AndrleHoenickeGwaltetal., author = {Andrle, Anna and H{\"o}nicke, Philipp and Gwalt, Grzegorz and Schneider, Philipp-Immanuel and Kayser, Yves and Siewert, Frank and Soltwisch, Victor}, title = {GIXRF and machine learning as metrological tools for shape and element sensitive reconstructions of periodic nanostructures}, series = {Proc. SPIE}, volume = {11611}, journal = {Proc. SPIE}, doi = {10.1117/12.2586082}, pages = {116110R}, language = {en} } @article{AndrleHoenickeSchneideretal., author = {Andrle, Anna and H{\"o}nicke, Philipp and Schneider, Philipp-Immanuel and Kayser, Yves and Hammerschmidt, Martin and Burger, Sven and Scholze, Frank and Beckhoff, Burkhard and Soltwisch, Victor}, title = {Grazing incidence x-ray fluorescence based characterization of nanostructures for element sensitive profile reconstruction}, series = {Proc. SPIE}, volume = {11057}, journal = {Proc. SPIE}, doi = {10.1117/12.2526082}, pages = {110570M}, language = {en} } @article{AndrleHoenickeGwaltetal., author = {Andrle, Anna and H{\"o}nicke, Philipp and Gwalt, Grzegorz and Schneider, Philipp-Immanuel and Kayser, Yves and Siewert, Frank and Soltwisch, Victor}, title = {Shape- and Element-Sensitive Reconstruction of Periodic Nanostructures with Grazing Incidence X-ray Fluorescence Analysis and Machine Learning}, series = {Nanomaterials}, volume = {11}, journal = {Nanomaterials}, doi = {10.3390/nano11071647}, pages = {1647}, language = {en} }