@inproceedings{KruegerBodermannKoeningetal.2023, author = {Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Manley, Phillip and Zschiedrich, Lin and Schneider, Philipp-Immanuel and Heinrich, Andreas and Eder, Christian and Zeiser, Ulrike and Goehnermeier, Aksel}, title = {On aberration retrieval for optical microscopes in length metrology}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2672294}, pages = {PC126190A}, year = {2023}, language = {en} } @inproceedings{ManleyKruegerBodermannetal.2023, author = {Manley, Phillip and Kr{\"u}ger, Jan and Bodermann, Bernd and K{\"o}ning, Rainer and Heinrich, Andreas and Eder, Christian and Goehnermeier, Aksel and Zeiser, Ulrike and Hammerschmidt, Martin and Zschiedrich, Lin and Schneider, Philipp-Immanuel}, title = {Efficient simulation of microscopic imaging for reconstruction of nanostructures}, volume = {PC12619}, booktitle = {Proc. SPIE}, doi = {10.1117/12.2673077}, pages = {PC126190B}, year = {2023}, language = {en} }